Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940739 | Metrology apparatus | Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Hans Butler, Hugo Augustinus Joseph Cramer +4 more | 2024-03-26 |
| 11549806 | Metrology apparatus | Arie Jeffrey Den Boef, Nitesh Pandey | 2023-01-10 |
| 11262661 | Metrology apparatus | Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Hans Butler, Hugo Augustinus Joseph Cramer +4 more | 2022-03-01 |
| 10895452 | Metrology apparatus | Arie Jeffrey Den Boef, Nitesh Pandey | 2021-01-19 |
| 10809193 | Inspection apparatus having non-linear optics | Richard Carl Zimmerman | 2020-10-20 |
| 10775704 | Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein | Nitesh Pandey, Arie Jeffrey Den Boef | 2020-09-15 |
| 10488765 | Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus | Johan Maria Van Boxmeer, Koos Van Berkel, Sietse Thijmen Van Der Post, Johannes Hubertus Antonius Van De Rijdt | 2019-11-26 |
| 10365565 | Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein | Nitesh Pandey, Arie Jeffrey Den Boef | 2019-07-30 |
| 9927711 | Actuation mechanism, optical apparatus and lithography apparatus | Sven Antoin Johan Hol, Andrea Lodovico Mancuso, Hendricus Johannes Maria Meijer, Erik Maria Rekkers | 2018-03-27 |
| 9785051 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Jan Bernard Plechelmus Van Schoot, Sven Antoin Johan Hol, Edwin Johan Buis, Erik Maria Rekkers, Gosse Charles De Vries +2 more | 2017-10-10 |
| 8867021 | Illumination system, lithographic apparatus and method of adjusting an illumination mode | Gosse Charles De Vries, Edwin Johan Buis, Jan Bernard Plechelmus Van Schoot, Fidelus Adrianus Boon, Hermanus Johannes Maria Kreuwel | 2014-10-21 |
| 8675169 | Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method | Frank Johannes Jacobus Van Boxtel, Johannes Christiaan Maria Jasper, Ronald Van Der Ham, Sergei Shulepov, Gerben Pieterse +3 more | 2014-03-18 |
| 8218130 | Device manufacturing method and lithographic apparatus,and computer program product | — | 2012-07-10 |
| 7148954 | Lithographic apparatus and method for its use | — | 2006-12-12 |
| 5111037 | Device for measuring light scattered by an information support | Emile E. M. Boderie | 1992-05-05 |