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Fluid handling system and lithographic apparatus |
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2024-08-27 |
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Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
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2022-04-12 |
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Lithographic apparatus with improved patterning performance |
Federico La Torre, Laurentius Johannes Adrianus Van Bokhoven, José Nilton Fonseca, Jr., Erik Henricus Egidius Catharina Eummelen, Frank Johannes Jacobus Van Boxtel |
2021-06-29 |
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Lithographic apparatus, method of transferring a substrate and device manufacturing method |
Aart Adrianus Van Beuzekom, Jozef Augustinus Maria Alberti, Hubert Marie Segers, Ronald Van Der Ham, Francis Fahrni +5 more |
2021-02-09 |
| 10908517 |
Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing method |
Jean-Philippe Xavier Van Damme, Laurentius Johannes Adrianus Van Bokhoven, Petrus Franciscus Van Gils |
2021-02-02 |
| 10627721 |
Lithography apparatus, and a method of manufacturing a device |
Norbertus Josephus Martinus Van Den Nieuwelaar, Victor Manuel Blanco Carballo, Thomas Augustus Mattaar, Johannes Cornelis Paulus Melman, Johannes Theodorus Guillielmus Maria Van De Ven +2 more |
2020-04-21 |
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Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2019-12-31 |
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Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2019-11-19 |
| 10409174 |
Lithographic apparatus, method of transferring a substrate and device manufacturing method |
Aart Adrianus Van Beuzekom, Jozef Augustinus Maria Alberti, Hubert Marie Segers, Ronald Van Der Ham, Francis Fahrni +5 more |
2019-09-10 |
| 10324384 |
Lithographic apparatus and a method of manufacturing a lithographic apparatus |
Theodorus Wilhelmus Polet, Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Theodorus Marinus Modderman, Cornelius Maria Rops +3 more |
2019-06-18 |
| 10095129 |
Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus |
Giovanni Luca Gattobigio, Erik Henricus Egidius Catharina Eummelen, Ruud Olieslagers, Cornelius Maria Rops, Laurentius Johannes Adrianus Van Bokhoven |
2018-10-09 |
| 9915877 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2018-03-13 |
| 9904177 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Ivo Adam Johannes Thomas, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Thibault Simon Mathieu Laurent, Gregory Martin Mason Corcoran +2 more |
2018-02-27 |
| 9897928 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2018-02-20 |
| 9785055 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2017-10-10 |
| 9044725 |
Effective droplet drying |
René Jos Houben, Leonardus Antonius Maria Brouwers, Gerrit Oosterhuis, Frits Verhoeven |
2015-06-02 |
| 8675169 |
Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Frank Johannes Jacobus Van Boxtel, Marinus Johannes Maria Van Dam, Johannes Christiaan Maria Jasper, Ronald Van Der Ham, Sergei Shulepov +3 more |
2014-03-18 |