Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916453 | Lithographic apparatus, method of transferring a substrate and device manufacturing method | Aart Adrianus Van Beuzekom, Hubert Marie Segers, Ronald Van Der Ham, Francis Fahrni, Ruud Olieslagers +5 more | 2021-02-09 |
| 10409174 | Lithographic apparatus, method of transferring a substrate and device manufacturing method | Aart Adrianus Van Beuzekom, Hubert Marie Segers, Ronald Van Der Ham, Francis Fahrni, Ruud Olieslagers +5 more | 2019-09-10 |
| 8154709 | Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus | Gerardus Petrus Matthijs Van Nunen, Frans Erik Groensmit, Rene Theodorus Petrus Compen, Marco Adrianus Peter Van Den Heuvel | 2012-04-10 |
| 8149387 | Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus | Gerardus Petrus Matthijs Van Nunen, Frans Erik Groensmit, Rene Theodorus Petrus Compen, Abraham Alexander Soethoudt | 2012-04-03 |
| 8086348 | Method of transferring a substrate, transfer system and lithographic projection apparatus | Gerardus Petrus Matthijs Van Nunen, Frans Erik Groensmit, Rene Theodorus Petrus Compen | 2011-12-27 |
| 8064045 | Method of transferring a substrate, transfer system and lithographic projection apparatus | Gerardus Petrus Matthijs Van Nunen, Frans Erik Groensmit, Rene Theodorus Petrus Compen | 2011-11-22 |