| 10466595 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2019-11-05 |
| 9798246 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2017-10-24 |
| 9477160 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2016-10-25 |
| 8964164 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2015-02-24 |
| 8724084 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2014-05-13 |
| 8724083 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2014-05-13 |
| 8384882 |
Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrate |
Rene Theodorus Petrus Compen, Martijn Houben, Marco Adrianus Peter Van Den Heuvel |
2013-02-26 |
| 8154709 |
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus |
Jozef Augustinus Maria Alberti, Frans Erik Groensmit, Rene Theodorus Petrus Compen, Marco Adrianus Peter Van Den Heuvel |
2012-04-10 |
| 8149387 |
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus |
Jozef Augustinus Maria Alberti, Frans Erik Groensmit, Rene Theodorus Petrus Compen, Abraham Alexander Soethoudt |
2012-04-03 |
| 8086348 |
Method of transferring a substrate, transfer system and lithographic projection apparatus |
Jozef Augustinus Maria Alberti, Frans Erik Groensmit, Rene Theodorus Petrus Compen |
2011-12-27 |
| 8064045 |
Method of transferring a substrate, transfer system and lithographic projection apparatus |
Jozef Augustinus Maria Alberti, Frans Erik Groensmit, Rene Theodorus Petrus Compen |
2011-11-22 |
| 7936444 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2011-05-03 |
| 7352434 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Levinus Pieter Bakker, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen +12 more |
2008-04-01 |
| 7030967 |
Lithographic apparatus, device manufacturing method and substrate holder |
Robertus Nicodemus Jacobus Van Ballegoij, Martinus Agnes Willem Cuijpers, Pieter Johannes Gertrudis Meijers, Joost Jeroen Ottens |
2006-04-18 |