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Fluid handling system, method and lithographic apparatus |
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Fluid handling system, method and lithographic apparatus |
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Electrode for use in a layered device structure, as well as a battery device |
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Fluid handling structure for lithographic apparatus |
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Fluid handling structure and lithographic apparatus |
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Fluid handling structure for lithographic apparatus |
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Fluid handling structure and lithographic apparatus |
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Method and system for heat recovery |
— |
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| 11143969 |
Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus |
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Fluid handling structure for lithographic apparatus |
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Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu +4 more |
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Lithographic apparatus, method of transferring a substrate and device manufacturing method |
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Fluid handling structure, a lithographic apparatus and a device manufacturing method |
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Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Walter Theodorus Matheus STALS, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo, Erik Henricus Egidius Catharina Eummelen +3 more |
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Fluid handling structure and lithographic apparatus |
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Lithographic apparatus, method of transferring a substrate and device manufacturing method |
Aart Adrianus Van Beuzekom, Jozef Augustinus Maria Alberti, Hubert Marie Segers, Ronald Van Der Ham, Francis Fahrni +5 more |
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Lithographic apparatus and a method of manufacturing a lithographic apparatus |
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2019-06-18 |
| 10133190 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Michel Riepen |
2018-11-20 |
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Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus |
Giovanni Luca Gattobigio, Erik Henricus Egidius Catharina Eummelen, Ruud Olieslagers, Gerben Pieterse, Laurentius Johannes Adrianus Van Bokhoven |
2018-10-09 |
| 10018921 |
Lithographic apparatus and a device manufacturing method |
Nicolaas Rudolf Kemper, Michel Riepen |
2018-07-10 |
| 10001712 |
Immersion lithographic apparatus and device manufacturing method |
Theodorus Wilhelmus Polet, Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Han Henricus Aldegonda Lempens, Theodorus Marinus Modderman +3 more |
2018-06-19 |
| 9971255 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
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Lithographic apparatus and a device manufacturing method |
Nicolaas Rudolf Kemper, Michel Riepen |
2017-08-29 |
| 9625828 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Michel Riepen, Erik Henricus Egidius Catharina Eummelen, Sandra Van Der Graaf, Rogier Hendrikus Magdalena Cortie, Takeshi Kaneko +6 more |
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| 9625829 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
David Bessems |
2017-04-18 |