Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197140 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David | 2025-01-14 |
| 11963285 | Target material control in an EUV light source | Abhiram Govindaraju, Sandeep Rai, Petrus Adrianus Willems, Serkan Kincal, Joshua Mark Lukens +1 more | 2024-04-16 |
| 11774012 | Apparatus for high pressure connection | Jon David Tedrow, Wei-Hsun Chen | 2023-10-03 |
| 11500297 | Anti-rotation coupling | Jon David Tedrow, Colin Michael Odneal | 2022-11-15 |
| 11215933 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David | 2022-01-04 |
| 10859919 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Cornelius Maria Rops, Walter Theodorus Matheus STALS, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo, Erik Henricus Egidius Catharina Eummelen +3 more | 2020-12-08 |
| 10551748 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Cornelius Maria Rops, Walter Theodorus Matheus STALS, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo, Erik Henricus Egidius Catharina Eummelen +3 more | 2020-02-04 |
| 10451980 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David | 2019-10-22 |
| 10437162 | Methods and apparatuses for protecting a seal in a pressure vessel of a photolithography system | Jon David Tedrow, Colin Michael Odneal | 2019-10-08 |
| 9625828 | Fluid handling structure, lithographic apparatus and device manufacturing method | Michel Riepen, Erik Henricus Egidius Catharina Eummelen, Sandra Van Der Graaf, Rogier Hendrikus Magdalena Cortie, Takeshi Kaneko +6 more | 2017-04-18 |
| 9625829 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Cornelius Maria Rops | 2017-04-18 |
| 9625833 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Mathieus Anna Karel Van Lierop, Samuel Bertrand Dominique David | 2017-04-18 |
| 9618835 | Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure | Daniel Jozef Maria Direcks, Erik Henricus Egidius Catharina Eummelen, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Sergei Shulepov +2 more | 2017-04-11 |
| 9563132 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Erik Henricus Egidius Catharina Eummelen, Michel Riepen, Rogier Hendrikus Magdalena Cortie, Adrianes Johannes Baeten, Cornelius Maria Rops | 2017-02-07 |
| 9291914 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Marcus Johannes Van Der Zanden, Cornelius Maria Rops, Paul A. Willems, Jimmy Matheus Wilhelmus Van De Winkel +1 more | 2016-03-22 |
| 9059228 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David | 2015-06-16 |
| 8836912 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Erik Henricus Egidius Catharina Eummelen, Rogier Hendrikus Magdalena Cortie, Marcus Johannes Van Der Zanden, Jimmy Matheus Wilhelmus Van De Winkel, Cornelius Maria Rops +1 more | 2014-09-16 |
| 8508712 | Fluid handling structure, lithographic apparatus and device manufacturing method | Clemens Johannes Gerardus Van Den Dungen, Danny Maria Hubertus Philips, Koen Steffens, Tijmen Wilfred Mathijs Gunther | 2013-08-13 |
| 8405817 | Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method | Marco Koert Stavenga, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +16 more | 2013-03-26 |
| 8394572 | Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus | Marcus Theodoor Wilhelmus Van Der Heijden, Marco Koert Stavenga, Patrick Wong, Frederik Johannes Van Den Bogaard, Dirk De Vries +1 more | 2013-03-12 |
| 8114568 | Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus | Marcus Theodoor Wilhelmus Van Der Heijden, Marco Koert Stavenga, Patrick Wong, Frederik Johannes Van Den Bogaard, Dirk De Vries +1 more | 2012-02-14 |