Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339214 | Apparatus for and method of monitoring droplets in a droplet stream | — | 2025-06-24 |
| 11963285 | Target material control in an EUV light source | Abhiram Govindaraju, David Bessems, Sandeep Rai, Petrus Adrianus Willems, Serkan Kincal +1 more | 2024-04-16 |
| 11690159 | Apparatus and method for extending target material delivery system lifetime | Bob Rollinger, Georgiy O. Vaschenko, Chirag Rajyaguru, Alexander I. Ershov, Mathew Abraham | 2023-06-27 |
| 11240904 | Apparatus for and method of controlling coalescence of droplets in a droplet stream | Bob Rollinger, Pooriya Beyhaghi | 2022-02-01 |