Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11963285 | Target material control in an EUV light source | David Bessems, Sandeep Rai, Petrus Adrianus Willems, Serkan Kincal, Joshua Mark Lukens +1 more | 2024-04-16 |
| 10426020 | Droplet generator steering system | Peter Michael Baumgart, John M. Algots, Chirag Rajyaguru | 2019-09-24 |
| 9279445 | Droplet generator steering system | Peter Michael Baumgart, J. Martin Algots, Chirag Rajyaguru | 2016-03-08 |
| 8368039 | EUV light source glint reduction system | William N. Partlo | 2013-02-05 |