Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222050 | Robust fluid coupling apparatus | Benjamin Andrew Sams, Dietmar Uwe Herbert Trees, Vikas Giridhar Telkar, Alexander I. Ershov, Theodorus Wilhelmus Driessen | 2025-02-11 |
| 11963285 | Target material control in an EUV light source | Abhiram Govindaraju, David Bessems, Sandeep Rai, Petrus Adrianus Willems, Joshua Mark Lukens +1 more | 2024-04-16 |
| 7899571 | Predictive method to improve within wafer CMP uniformity through optimized pad conditioning | Gul B. Basim, Eugene C. Davis | 2011-03-01 |