Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11690159 | Apparatus and method for extending target material delivery system lifetime | Bob Rollinger, Georgiy O. Vaschenko, Alexander I. Ershov, Joshua Mark Lukens, Mathew Abraham | 2023-06-27 |
| 11317501 | Method of purifying target material for an EUV light source | Georgiy O. Vaschenko, Peter Michael Baumgart, Benjamin Andrew Sams, Armin Bernhard Ridinger, Janine Kardokus | 2022-04-26 |
| 10632505 | System method and apparatus for high pressure liquid jet cleaning of sintered filters | Armin Bernhard Ridinger, Georgiy O. Vaschenko, Peter Michael Baumgart, Timothy Richard Palmer | 2020-04-28 |
| 10455680 | Method and apparatus for purifying target material for EUV light source | Georgiy O. Vaschenko, Peter Michael Baumgart, Benjamin Andrew Sams, Armin Bernhard Ridinger, Janine Kardokus | 2019-10-22 |
| 10426020 | Droplet generator steering system | Peter Michael Baumgart, John M. Algots, Abhiram Govindaraju | 2019-09-24 |
| 9699876 | Method of and apparatus for supply and recovery of target material | Georgiy O. Vaschenko, Peter Michael Baumgart, Jeffrey Gacutan, Martin Algots, Theodosios Syrpis +1 more | 2017-07-04 |
| 9544983 | Apparatus for and method of supplying target material | John M. Algots, Tetsuya Ishikawa, Peter Michael Baumgart | 2017-01-10 |
| 9279445 | Droplet generator steering system | Peter Michael Baumgart, J. Martin Algots, Abhiram Govindaraju | 2016-03-08 |
| 8969840 | Droplet generator with actuator induced nozzle cleaning | Peter Michael Baumgart, Georgiy O. Vaschenko | 2015-03-03 |
| 8829477 | Droplet generator with actuator induced nozzle cleaning | Peter Michael Baumgart, Georgiy O. Vaschenko | 2014-09-09 |
| 8513629 | Droplet generator with actuator induced nozzle cleaning | Peter Michael Baumgart, Georgiy O. Vaschenko | 2013-08-20 |