Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11317501 | Method of purifying target material for an EUV light source | Georgiy O. Vaschenko, Peter Michael Baumgart, Chirag Rajyaguru, Benjamin Andrew Sams, Armin Bernhard Ridinger | 2022-04-26 |
| 10455680 | Method and apparatus for purifying target material for EUV light source | Georgiy O. Vaschenko, Peter Michael Baumgart, Chirag Rajyaguru, Benjamin Andrew Sams, Armin Bernhard Ridinger | 2019-10-22 |
| 9279178 | Manufacturing design and processing methods and apparatus for sputtering targets | Michael R. Pinter, Michael D. Payton, Steven Wu, Jared Akins, Werner Hort | 2016-03-08 |
| 9246298 | Corrosion resistant electrodes for laser chambers | Thomas Patrick Duffey, William N. Partlo | 2016-01-26 |
| 8030082 | Liquid-particle analysis of metal materials | Susan D. Strothers, Brett M. Clark | 2011-10-04 |
| 7022948 | Chamber for uniform substrate heating | Quanyuan Shang, Akihiro Hosokawa | 2006-04-04 |
| 6858102 | Copper-containing sputtering targets, and methods of forming copper-containing sputtering targets | Chi tse Wu, Christopher Parfeniuk, Jane Buehler | 2005-02-22 |
| 6849139 | Methods of forming copper-containing sputtering targets | Chi tse Wu, Christopher Parfeniuk, Jane Buehler | 2005-02-01 |
| 6765178 | Chamber for uniform substrate heating | Quanyuan Shang, Akihiro Hosokawa | 2004-07-20 |
| 6645427 | Copper sputtering target assembly and method of making same | Chi tse Wu, Christopher Parfeniuk, Jane Buehler | 2003-11-11 |
| 6555250 | Ni-plated target diffusion bonded to a backing plate and method of making same | Ritesh P. Shah, David E. Steele, William R. Turner, Anthony F. Beier, Susan D. Strothers | 2003-04-29 |
| 6451185 | Diffusion bonded sputtering target assembly with precipitation hardened backing plate and method of making same | Anthony F. Beier, Susan D. Strothers | 2002-09-17 |
| 6331234 | Copper sputtering target assembly and method of making same | Chi tse Wu, Christopher Parfeniuk, Jane Buehler | 2001-12-18 |
| 6274015 | Diffusion bonded sputtering target assembly with precipitation hardened backing plate and method of making same | Anthony F. Beier, Susan D. Strothers | 2001-08-14 |
| 6113761 | Copper sputtering target assembly and method of making same | Chi tse Wu, Christopher Parfeniuk, Jane Buehler | 2000-09-05 |
| 5863398 | Hot pressed and sintered sputtering target assemblies and method for making same | Diana Morales | 1999-01-26 |
| 5809393 | Sputtering target with ultra-fine, oriented grains and method of making same | John A. Dunlop, Jun Yuan, Roger Emigh | 1998-09-15 |
| 5803342 | Method of making high purity copper sputtering targets | — | 1998-09-08 |
| 5780755 | Sputtering target with ultra-fine, oriented grains and method of making same | John A. Dunlop, Jun Yuan, Roger Emigh | 1998-07-14 |
| 5590389 | Sputtering target with ultra-fine, oriented grains and method of making same | John A. Dunlop, Jun Yuan, Roger Emigh | 1996-12-31 |