| 6030514 |
Method of reducing sputtering burn-in time, minimizing sputtered particulate, and target assembly therefor |
Michael Goldstein, Gerald Feldewerth, Cari H. Shim, Stephan Schittny |
2000-02-29 |
| 5809393 |
Sputtering target with ultra-fine, oriented grains and method of making same |
Jun Yuan, Janine Kardokus, Roger Emigh |
1998-09-15 |
| 5780755 |
Sputtering target with ultra-fine, oriented grains and method of making same |
Jun Yuan, Janine Kardokus, Roger Emigh |
1998-07-14 |
| 5590389 |
Sputtering target with ultra-fine, oriented grains and method of making same |
Jun Yuan, Janine Kardokus, Roger Emigh |
1996-12-31 |
| RE33313 |
Method for making low alpha count lead |
Robert W. Smyth, Gerald W. Toop |
1990-08-28 |
| 4915802 |
Method for making low alpha count lead |
Edward F. G. Milner, Robert W. Smyth, Gerald W. Toop |
1990-04-10 |
| 4887492 |
Method for making low alpha count lead |
Edward F. G. Milner, Robert W. Smyth, Gerald W. Toop |
1989-12-19 |
| 4838935 |
Method for making tungsten-titanium sputtering targets and product |
Hans Rensing |
1989-06-13 |
| 4770698 |
Method for making low alpha count lead |
Robert W. Smyth, Gerald W. Toop |
1988-09-13 |