Issued Patents All Time
Showing 25 most recent of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10294559 | Target cooling through gun drilled holes | Yoshiaki Tanase, Makoto Inagawa | 2019-05-21 |
| 9222165 | Cooled PVD shield | Bradley O. Stimson, Hienminh Huu Le, Makoto Inagawa | 2015-12-29 |
| 8961756 | Ganged scanning of multiple magnetrons, especially two level folded magnetrons | Makoto Inagawa, Hien Minh Le, Bradley O. Stimson, John M. White | 2015-02-24 |
| 8875547 | Washing machine, and ozone generator | Masami Suzuki | 2014-11-04 |
| 8783390 | Vehicle drive apparatus | Yoshinori Maeda, Yousuke Suzuki, Michitaka Tsuchida, Kazuya Okumura, Tadahiro Oshiumi +2 more | 2014-07-22 |
| 8714663 | Wheel brake/drive force control device | Yoshinori Maeda, Yasuhiro Oshiumi, Michitaka Tsuchida, Kazuya Okumura, Kensuke Yoshizue +1 more | 2014-05-06 |
| 8574411 | Reactive sputtering chamber with gas distribution tubes | John M. White, Yan Ye | 2013-11-05 |
| 8500975 | Method and apparatus for sputtering onto large flat panels | Hien Minh Le, Avi Tepman | 2013-08-06 |
| 8206548 | Substrate processing apparatus and substrate processing method | Itsuki Kajino, Kozo Terashima | 2012-06-26 |
| 8182661 | Controllable target cooling | Yoshiaki Tanase, Makoto Inagawa | 2012-05-22 |
| 7976635 | Dual substrate loadlock process equipment | Shinichi Kurita, Wendell T. Blonigan | 2011-07-12 |
| 7879210 | Partially suspended rolling magnetron | Makoto Inagawa, John M. White | 2011-02-01 |
| 7815782 | PVD target | Makoto Inagawa, Bradley O. Stimson, Hienminh Huu Le, Jrjyan Jerry CHEN | 2010-10-19 |
| 7652223 | Electron beam welding of sputtering target tiles | Yoshiaki Tanase | 2010-01-26 |
| 7644745 | Bonding of target tiles to backing plate with patterned bonding agent | Hien Minh Le | 2010-01-12 |
| 7641434 | Dual substrate loadlock process equipment | Shinichi Kurita, Wendell T. Blonigan | 2010-01-05 |
| 7628899 | Apparatus and method of positioning a multizone magnetron assembly | John M. White, Hien Minh Le | 2009-12-08 |
| 7566900 | Integrated metrology tools for monitoring and controlling large area substrate processing chambers | Hienminh Huu Le | 2009-07-28 |
| 7550055 | Elastomer bonding of large area sputtering target | Hienminh Huu Le | 2009-06-23 |
| 7505832 | Method and apparatus for determining a substrate exchange position in a processing system | Dongchoon Suh, Hung T. Nguyen | 2009-03-17 |
| 7442900 | Chamber for uniform heating of large area substrates | Makoto Inagawa | 2008-10-28 |
| 7432184 | Integrated PVD system using designated PVD chambers | Makoto Inagawa, Hienminh Huu Le, John M. White | 2008-10-07 |
| 7429718 | Heating and cooling of substrate support | Makoto Inagawa | 2008-09-30 |
| 7316763 | Multiple target tiles with complementary beveled edges forming a slanted gap therebetween | Hien Minh Le | 2008-01-08 |
| 7073834 | Multiple section end effector assembly | Takayuki Matsumoto | 2006-07-11 |