Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7062161 | Photoirradiation thermal processing apparatus and thermal processing susceptor employed therefor | Tatsufumi Kusuda, Hiromi Murayama | 2006-06-13 |
| 7041939 | Thermal processing apparatus and thermal processing method | — | 2006-05-09 |
| 7022948 | Chamber for uniform substrate heating | Quanyuan Shang, Janine Kardokus | 2006-04-04 |
| 6998579 | Chamber for uniform substrate heating | Makoto Inagawa | 2006-02-14 |
| 6977788 | Method and apparatus for adjusting angular position of magnetic head unit | Satoshi Yamaguchi, Makoto Ohashi, Mitsuo Hayashi | 2005-12-20 |
| 6949143 | Dual substrate loadlock process equipment | Shinichi Kurita, Wendell T. Blonigan | 2005-09-27 |
| 6936797 | Thermal processing method and thermal processing apparatus for substrate employing photoirradiation | — | 2005-08-30 |
| 6917755 | Substrate support | Andrew Nguyen, Gerhard Schneider, Takayuki Matsumoto | 2005-07-12 |
| 6825447 | Apparatus and method for uniform substrate heating and contaminate collection | Sam Kim, Dong Choon Suh | 2004-11-30 |
| 6773562 | Shadow frame for substrate processing | Makoto Inagawa, Richard E. Demaray | 2004-08-10 |
| 6765178 | Chamber for uniform substrate heating | Quanyuan Shang, Janine Kardokus | 2004-07-20 |
| 6634686 | End effector assembly | — | 2003-10-21 |
| 6623563 | Susceptor with bi-metal effect | — | 2003-09-23 |
| 6460369 | Consecutive deposition system | — | 2002-10-08 |
| 6267851 | Tilted sputtering target with shield to block contaminants | — | 2001-07-31 |
| 6257045 | Automated substrate processing systems and methods | Richard E. Demaray, Makoto Inagawa, Ravi Mullapudi, Harlan L. Halsey, Michael T. Starr | 2001-07-10 |
| 6205870 | Automated substrate processing systems and methods | Richard E. Demaray, Makoto Inagawa, Ravi Mullapudi, Harlan L. Halsey, Michael T. Starr | 2001-03-27 |
| 5855744 | Non-planar magnet tracking during magnetron sputtering | Harlan I. Halsey, Richard E. Demaray, Russell Weldon Black, Allan De Salvo, Victoria L. Hall | 1999-01-05 |
| 5799860 | Preparation and bonding of workpieces to form sputtering targets and other assemblies | Richard E. Demaray, Manuel J. Herrera | 1998-09-01 |
| 5716133 | Shielded heat sensor for measuring temperature | Masahiko Kowaka | 1998-02-10 |
| 5518593 | Shield configuration for vacuum chamber | Richard E. Demaray, David E. Berkstresser | 1996-05-21 |
| 5345999 | Method and apparatus for cooling semiconductor wafers | — | 1994-09-13 |
| 5303514 | Rail grinding apparatus | Hirotsugu Oishibashi, Soji Fujimori, Muneyuki Ohara, Haruo Yokoyama, Kosuke Nagai +1 more | 1994-04-19 |
| 5106200 | Apparatus for measuring temperature of wafer | — | 1992-04-21 |