Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6257045 | Automated substrate processing systems and methods | Akihiro Hosokawa, Richard E. Demaray, Makoto Inagawa, Ravi Mullapudi, Michael T. Starr | 2001-07-10 |
| 6205870 | Automated substrate processing systems and methods | Akihiro Hosokawa, Richard E. Demaray, Makoto Inagawa, Ravi Mullapudi, Michael T. Starr | 2001-03-27 |