Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10604846 | Thin film encapsulation mask preheat and substrate buffer chamber | Shinichi Kurita, Suhas Bhoski | 2020-03-31 |
| 10453718 | Slit valve door with moving mating part | Mehran Behdjat, Shinichi Kurita, John M. White, Suhail Anwar | 2019-10-22 |
| 10294559 | Target cooling through gun drilled holes | Yoshiaki Tanase, Akihiro Hosokawa | 2019-05-21 |
| 10265868 | Transfer robot with substrate cooling | Shinichi Kurita, Takayuki Matsumoto | 2019-04-23 |
| 9922854 | Vertical inline CVD system | Shinichi Kurita, Jozef Kudela, Suhail Anwar, John M. White, Dong-Kil Yim +3 more | 2018-03-20 |
| 9691650 | Substrate transfer robot with chamber and substrate monitoring capability | Shinichi Kurita, Takayuki Matsumoto, Suhail Anwar | 2017-06-27 |
| 9382621 | Ground return for plasma processes | Soo Young Choi, Robin L. Tiner, Shinichi Kurita, John M. White, Carl A. Sorensen +3 more | 2016-07-05 |
| 9324597 | Vertical inline CVD system | Shinichi Kurita, Jozef Kudela, Suhail Anwar, John M. White, Dong-Kil Yim +3 more | 2016-04-26 |
| 9222165 | Cooled PVD shield | Akihiro Hosokawa, Bradley O. Stimson, Hienminh Huu Le | 2015-12-29 |
| 8961756 | Ganged scanning of multiple magnetrons, especially two level folded magnetrons | Hien Minh Le, Akihiro Hosokawa, Bradley O. Stimson, John M. White | 2015-02-24 |
| 8915389 | Electron beam welding of large vacuum chamber body having a high emissivity coating | Shinichi Kurita, Mehran Behdjat | 2014-12-23 |
| 8567756 | Slit valve door able to compensate for chamber deflection | Mehran Behdjat, Shinichi Kurita, John M. White, Suhail Anwar | 2013-10-29 |
| 8528762 | Electron beam welding of large vacuum chamber body having a high emissivity coating | Shinichi Kurita, Mehran Behdjat | 2013-09-10 |
| D687535 | Heater plate and heater element assembly | Shinichi Kurita | 2013-08-06 |
| D670372 | Heater plate and heater element assembly | Shinichi Kurita | 2012-11-06 |
| 8182661 | Controllable target cooling | Yoshiaki Tanase, Akihiro Hosokawa | 2012-05-22 |
| 8097133 | Evacuable magnetron chamber | — | 2012-01-17 |
| 8070408 | Load lock chamber for large area substrate processing system | Mehran Behdjat, Shinichi Kurita, Suhail Anwar | 2011-12-06 |
| 7879210 | Partially suspended rolling magnetron | Akihiro Hosokawa, John M. White | 2011-02-01 |
| 7834994 | Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate | William Bagley, Paohuei Lee, Kyung Tae Kim, Sam Kim, Toshio Kiyotake +4 more | 2010-11-16 |
| 7815782 | PVD target | Bradley O. Stimson, Akihiro Hosokawa, Hienminh Huu Le, Jrjyan Jerry CHEN | 2010-10-19 |
| D622744 | Load lock roller ball support | — | 2010-08-31 |
| 7652227 | Heating and cooling plate for a vacuum chamber | — | 2010-01-26 |
| 7442900 | Chamber for uniform heating of large area substrates | Akihiro Hosokawa | 2008-10-28 |
| 7440091 | Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate | William Bagley, Paohuei Lee, Kyung Tae Kim, Sam Kim, Toshio Kiyotake +4 more | 2008-10-21 |