Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7432184 | Integrated PVD system using designated PVD chambers | Akihiro Hosokawa, Hienminh Huu Le, John M. White | 2008-10-07 |
| 7429718 | Heating and cooling of substrate support | Akihiro Hosokawa | 2008-09-30 |
| 7226514 | Spin-rinse-dryer | Anwar Husain, Brian J. Brown, David G. Andeen, Svetlana Sherman, John M. White +2 more | 2007-06-05 |
| 6998579 | Chamber for uniform substrate heating | Akihiro Hosokawa | 2006-02-14 |
| 6918864 | Roller that avoids substrate slippage | Brian J. Brown, Michael Sugarman, Daniel Ramar, Alexander Lerner | 2005-07-19 |
| 6897411 | Heated substrate support | Emanuel Beer | 2005-05-24 |
| 6773562 | Shadow frame for substrate processing | Akihiro Hosokawa, Richard E. Demaray | 2004-08-10 |
| 6516816 | Spin-rinse-dryer | Anwar Husain, Brian J. Brown, David G. Andeen, Svetlana Sherman, John M. White +2 more | 2003-02-11 |
| 6257045 | Automated substrate processing systems and methods | Akihiro Hosokawa, Richard E. Demaray, Ravi Mullapudi, Harlan L. Halsey, Michael T. Starr | 2001-07-10 |
| 6205870 | Automated substrate processing systems and methods | Akihiro Hosokawa, Richard E. Demaray, Ravi Mullapudi, Harlan L. Halsey, Michael T. Starr | 2001-03-27 |
| 5320419 | Parking brake circuit for hydraulically driven vehicle | — | 1994-06-14 |
| 5107718 | Combined hydraulic motor and speed reducer | — | 1992-04-28 |