| 12473639 |
Methods for forming films on substrates |
Roey Shaviv, Prashanth Kothnur, Satish Radhakrishnan, Xiaozhou Che |
2025-11-18 |
|
| 12438011 |
Apparatus and method for controlling a flow process material to a deposition chamber |
Roey Shaviv, Phillip Stout, Joseph M. Ranish, Prashanth Kothnur, Satish Radhakrishnan |
2025-10-07 |
|
| 12043895 |
Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors |
Prashanth Kothnur, Roey Shaviv, Satish Radhakrishnan |
2024-07-23 |
$84,339,000 |
| 11970775 |
Showerhead for providing multiple materials to a process chamber |
Prashanth Kothnur, Satish Radhakrishnan, Sergei Klimovich, Roey Shaviv |
2024-04-30 |
$79,776,000 |
| 11834743 |
Segmented showerhead for uniform delivery of multiple precursors |
Prashanth Kothnur, Roey Shaviv, Satish Radhakrishnan |
2023-12-05 |
$45,995,000 |
| 11756816 |
Carrier FOUP and a method of placing a carrier |
Steven Trey Tindel, Kim Vellore |
2023-09-12 |
$47,983,000 |
| 11692261 |
Evaporator chamber for forming films on substrates |
Roey Shaviv, Satish Radhakrishnan |
2023-07-04 |
|
| 11637004 |
Alignment module with a cleaning chamber |
Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kim Vellore, Kevin Moraes +1 more |
2023-04-25 |
$46,789,000 |
| 11631813 |
Deposition mask and methods of manufacturing and using a deposition mask |
Kevin Moraes |
2023-04-18 |
$36,767,000 |
| 11538706 |
System and method for aligning a mask with a substrate |
Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kim Vellore, Kevin Moraes +1 more |
2022-12-27 |
$54,393,000 |
| 11505863 |
Methods for forming films on substrates |
Roey Shaviv, Prashanth Kothnur, Satish Radhakrishnan, Xiaozhou Che |
2022-11-22 |
$48,755,000 |
| D969980 |
Deposition chamber showerhead |
Graeme Scott, Prashanth Kothnur |
2022-11-15 |
|
| D967351 |
Showerhead reflector |
Graeme Scott, Prashanth Kothnur |
2022-10-18 |
|
| 11414740 |
Processing system for forming layers |
Roey Shaviv, Michael P. Karazim, Kevin Moraes, Steven V. Sansoni, Andrew J. Constant +4 more |
2022-08-16 |
$38,686,000 |
| 11393703 |
Apparatus and method for controlling a flow process material to a deposition chamber |
Roey Shaviv, Phillip Stout, Joseph M. Ranish, Prashanth Kothnur, Satish Radhakrishnan |
2022-07-19 |
$63,937,000 |
| 11196360 |
System and method for electrostatically chucking a substrate to a carrier |
Kim Vellore, Steven Trey Tindel |
2021-12-07 |
$82,478,000 |
| 11195756 |
Proximity contact cover ring for plasma dicing |
James M. Holden, Ajay Kumar, Aparna Iyer, Alan Ouye |
2021-12-07 |
$82,478,000 |
| 11189516 |
Method for mask and substrate alignment |
Greg Freeman, Patricia A. Schulze, Ozkan Celik |
2021-11-30 |
$50,552,000 |
| 11183411 |
Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency |
Kim Vellore, Steven Trey Tindel |
2021-11-23 |
$124,354,000 |
| 11158540 |
Light-absorbing mask for hybrid laser scribing and plasma etch wafer singulation process |
Wenguang Li, James S. Papanu, Wei-Sheng Lei, Prabhat Kumar, Brad Eaton +1 more |
2021-10-26 |
$68,163,000 |
| 11056277 |
Magnetized substrate carrier apparatus with shadow mask for deposition |
Daniel Lee Diehl, Roey Shaviv |
2021-07-06 |
$60,527,000 |
| 11047039 |
Substrate carrier having hard mask |
Kim Vellore, Ami Sade, Steven V. Sansoni, Andrew J. Constant, Kevin Moraes +4 more |
2021-06-29 |
$47,858,000 |
| 10932323 |
Reflector and susceptor assembly for chemical vapor deposition reactor |
Brian H. Burrows, Abril Cabreros, David Masayuki Ishikawa, Brian J. Brown |
2021-02-23 |
|
| 10916464 |
Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency |
Kim Vellore, Steven Trey Tindel |
2021-02-09 |
$118,884,000 |
| 10692765 |
Transfer arm for film frame substrate handling during plasma singulation of wafers |
James M. Holden, Ajay Kumar, Brad Eaton, Aparna Iyer |
2020-06-23 |
$29,749,000 |
