| 12334341 |
Chamber body feedthrough for in chamber resistive heating element |
Ala Moradian, Zuoming ZHU, Chia Cheng Chin |
2025-06-17 |
|
| 12324061 |
Epitaxial deposition chamber |
Shu-Kwan LAU, Zhiyuan Ye, Richard O. Collins, Enle CHOO, Danny D. WANG +5 more |
2025-06-03 |
|
| 12188148 |
Multi-layer EPI chamber body |
Shu-Kwan LAU, Zhiyuan Ye, Richard O. Collins |
2025-01-07 |
|
| 12037701 |
Multi-thermal CVD chambers with shared gas delivery and exhaust system |
Zhiyuan Ye, Shu-Kwan LAU, Lori D. Washington, Herman Diniz, Martin A. Hilkene +4 more |
2024-07-16 |
$116,305,000 |
| 11807931 |
Chamber injector |
Shu-Kwan LAU, Lit Ping LAM, Preetham Rao, Kartik Shah, Ian Ong +1 more |
2023-11-07 |
$37,048,000 |
| 11680338 |
Linear lamp array for improved thermal uniformity and profile control |
Shu-Kwan LAU, Zhiyuan Ye |
2023-06-20 |
$48,645,000 |
| 11578004 |
Methods and apparatus for depositing materials on a continuous substrate |
David Masayuki Ishikawa |
2023-02-14 |
$35,617,000 |
| 11492704 |
Chamber injector |
Shu-Kwan LAU, Lit Ping LAM, Preetham Rao, Kartik Shah, Ian Ong +1 more |
2022-11-08 |
$47,551,000 |
| 11189508 |
Purged viewport for quartz dome in epitaxy reactor |
Ji-Dih HU, Janardhan Devrajan, Schubert S. Chu |
2021-11-30 |
$50,552,000 |
| 11117194 |
Additive manufacturing having energy beam and lamp array |
David Masayuki Ishikawa, Paul J. Steffas |
2021-09-14 |
$84,054,000 |
| 10995419 |
Methods and apparatus for gallium nitride deposition |
Ala Moradian, Kartik Shah, Shu-Kwan LAU |
2021-05-04 |
$101,757,000 |
| 10932323 |
Reflector and susceptor assembly for chemical vapor deposition reactor |
Abril Cabreros, David Masayuki Ishikawa, Brian J. Brown, Alexander Lerner |
2021-02-23 |
|
| 10259206 |
Epitaxial lift off systems and methods |
Brian J. Brown, David Berkstressor, Gang He, Thomas J. Gmitter |
2019-04-16 |
|
| 9982364 |
Process gas preheating systems and methods for double-sided multi-substrate batch processing |
David Masayuki Ishikawa, Paul J. Steffas, Sumedh Acharya |
2018-05-29 |
$37,048,000 |
| 9644267 |
Multi-gas straight channel showerhead |
Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more |
2017-05-09 |
$25,128,000 |
| 9381731 |
Epitaxial lift off systems and methods |
Brian J. Brown, David Berkstressor, Gang He, Thomas J. Gmitter |
2016-07-05 |
|
| 9267205 |
Fastener system for supporting a liner plate in a gas showerhead reactor |
David Masayuki Ishikawa, Abril Cabreros |
2016-02-23 |
|
| 9142707 |
System and method for improved epitaxial lift off |
Brian J. Brown, Thomas J. Gmitter, Gang He |
2015-09-22 |
|
| 8663390 |
Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems |
David K. Carlson, Satheesh Kuppurao, Howard Beckford, Herman Diniz, Kailash Kiran Patalay +4 more |
2014-03-04 |
$12,560,000 |
| 8657994 |
System and method for improved epitaxial lift off |
Brian J. Brown, Thomas J. Gmitter, Gang He |
2014-02-25 |
|
| 8481118 |
Multi-gas straight channel showerhead |
Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more |
2013-07-09 |
$18,699,000 |
| 8183132 |
Methods for fabricating group III nitride structures with a cluster tool |
Sandeep Nijhawan, Tetsuya Ishikawa, Olga Kryliouk, Anand Vasudev, Jie Su +6 more |
2012-05-22 |
$10,508,000 |
| 7976631 |
Multi-gas straight channel showerhead |
Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more |
2011-07-12 |
$5,718,000 |
| 7976634 |
Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems |
David K. Carlson, Satheesh Kuppurao, Howard Beckford, Herman Diniz, Kailash Kiran Patalay +4 more |
2011-07-12 |
$5,718,000 |
| 7704327 |
High temperature anneal with improved substrate support |
Ann Waldhauer, Juan Chacin |
2010-04-27 |
$16,065,000 |
