Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334341 | Chamber body feedthrough for in chamber resistive heating element | Ala Moradian, Zuoming ZHU, Chia Cheng Chin | 2025-06-17 |
| 12324061 | Epitaxial deposition chamber | Shu-Kwan LAU, Zhiyuan Ye, Richard O. Collins, Enle CHOO, Danny D. WANG +5 more | 2025-06-03 |
| 12188148 | Multi-layer EPI chamber body | Shu-Kwan LAU, Zhiyuan Ye, Richard O. Collins | 2025-01-07 |
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Shu-Kwan LAU, Lori D. Washington, Herman Diniz, Martin A. Hilkene +4 more | 2024-07-16 |
| 11807931 | Chamber injector | Shu-Kwan LAU, Lit Ping LAM, Preetham Rao, Kartik Shah, Ian Ong +1 more | 2023-11-07 |
| 11680338 | Linear lamp array for improved thermal uniformity and profile control | Shu-Kwan LAU, Zhiyuan Ye | 2023-06-20 |
| 11578004 | Methods and apparatus for depositing materials on a continuous substrate | David Masayuki Ishikawa | 2023-02-14 |
| 11492704 | Chamber injector | Shu-Kwan LAU, Lit Ping LAM, Preetham Rao, Kartik Shah, Ian Ong +1 more | 2022-11-08 |
| 11189508 | Purged viewport for quartz dome in epitaxy reactor | Ji-Dih HU, Janardhan Devrajan, Schubert S. Chu | 2021-11-30 |
| 11117194 | Additive manufacturing having energy beam and lamp array | David Masayuki Ishikawa, Paul J. Steffas | 2021-09-14 |
| 10995419 | Methods and apparatus for gallium nitride deposition | Ala Moradian, Kartik Shah, Shu-Kwan LAU | 2021-05-04 |
| 10932323 | Reflector and susceptor assembly for chemical vapor deposition reactor | Abril Cabreros, David Masayuki Ishikawa, Brian J. Brown, Alexander Lerner | 2021-02-23 |
| 10259206 | Epitaxial lift off systems and methods | Brian J. Brown, David Berkstressor, Gang He, Thomas J. Gmitter | 2019-04-16 |
| 9982364 | Process gas preheating systems and methods for double-sided multi-substrate batch processing | David Masayuki Ishikawa, Paul J. Steffas, Sumedh Acharya | 2018-05-29 |
| 9644267 | Multi-gas straight channel showerhead | Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more | 2017-05-09 |
| 9381731 | Epitaxial lift off systems and methods | Brian J. Brown, David Berkstressor, Gang He, Thomas J. Gmitter | 2016-07-05 |
| 9267205 | Fastener system for supporting a liner plate in a gas showerhead reactor | David Masayuki Ishikawa, Abril Cabreros | 2016-02-23 |
| 9142707 | System and method for improved epitaxial lift off | Brian J. Brown, Thomas J. Gmitter, Gang He | 2015-09-22 |
| 8663390 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Howard Beckford, Herman Diniz, Kailash Kiran Patalay +4 more | 2014-03-04 |
| 8657994 | System and method for improved epitaxial lift off | Brian J. Brown, Thomas J. Gmitter, Gang He | 2014-02-25 |
| 8481118 | Multi-gas straight channel showerhead | Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more | 2013-07-09 |
| 8183132 | Methods for fabricating group III nitride structures with a cluster tool | Sandeep Nijhawan, Tetsuya Ishikawa, Olga Kryliouk, Anand Vasudev, Jie Su +6 more | 2012-05-22 |
| 7976631 | Multi-gas straight channel showerhead | Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch, Jacob Grayson +4 more | 2011-07-12 |
| 7976634 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Howard Beckford, Herman Diniz, Kailash Kiran Patalay +4 more | 2011-07-12 |
| 7704327 | High temperature anneal with improved substrate support | Ann Waldhauer, Juan Chacin | 2010-04-27 |