Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12324061 | Epitaxial deposition chamber | Shu-Kwan LAU, Brian H. Burrows, Zhiyuan Ye, Richard O. Collins, Enle CHOO +5 more | 2025-06-03 |
| 10858735 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Jason Michael Lamb, Jun Tae Choi, Rupankar Choudhury, Zhong Qiang Hua, Juan Carlos Rocha-Alvarez | 2020-12-08 |
| 10435786 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Jun Tae Choi, Rupankar Choudhury, Zhong Qiang Hua, Juan Carlos Rocha-Alvarez, Jason Michael Lamb | 2019-10-08 |
| 6537011 | Method and apparatus for transferring and supporting a substrate | Dmitry Lubomirsky, Erwin Polar, Brigitte Stoehr, Mark Wiltse, Yeuk-Fai Edwin Mok +1 more | 2003-03-25 |
| 6466426 | Method and apparatus for thermal control of a semiconductor substrate | Yeuk-Fai Edwin Mok, Dmitry Lubomirsky, Dennis Koosau, Senh Thach, Paul Exline | 2002-10-15 |