Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8663391 | Electrostatic chuck having a plurality of heater coils | Alexander Matyushkin, Theodoros Panagopoulos, John Holland | 2014-03-04 |
| 8475625 | Apparatus for etching high aspect ratio features | Sharma Pamarthy, Huutri Dao, Xiaoping Zhou, Kelly A. McDonough, Jivko Dinev +9 more | 2013-07-02 |
| 8226769 | Substrate support with electrostatic chuck having dual temperature zones | Alexander Matyushkin, Theodoros Panagopoulos, John Holland | 2012-07-24 |
| 6466426 | Method and apparatus for thermal control of a semiconductor substrate | Yeuk-Fai Edwin Mok, Dmitry Lubomirsky, Danny D. WANG, Senh Thach, Paul Exline | 2002-10-15 |