Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7319920 | Method and apparatus for self-calibration of a substrate handling robot | Bernardo Donoso, Vincent E. Burkhardt | 2008-01-15 |
| 7311810 | Two position anneal chamber | Son T. Nguyen | 2007-12-25 |
| 7223323 | Multi-chemistry plating system | Michael Yang, Ming Xi, Russell C. Ellwanger, Eric Bramwell Britcher, Bernardo Donoso +11 more | 2007-05-29 |
| 7138014 | Electroless deposition apparatus | Joseph Stevens, Dmitry Lubomirsky, Ian Pancham, Donald Olgado, Howard Grunes | 2006-11-21 |
| 6869516 | Method for removing electrolyte from electrical contacts and wafer touching areas | Dmitry Lubomirsky, Michael Yang, Girish Dixit, Vincent E. Burkhart, Allen L. D'Ambra +1 more | 2005-03-22 |
| 6824612 | Electroless plating system | Joseph Stevens, Dmitry Lubomirsky, Ian Pancham, Donald Olgado, Howard Grunes +1 more | 2004-11-30 |
| 6689418 | Apparatus for wafer rinse and clean and edge etching | Donald Olgado, Avi Tepman, Arnold Kholodenko | 2004-02-10 |
| 6537011 | Method and apparatus for transferring and supporting a substrate | Danny D. WANG, Dmitry Lubomirsky, Erwin Polar, Brigitte Stoehr, Mark Wiltse +1 more | 2003-03-25 |
| 6516815 | Edge bead removal/spin rinse dry (EBR/SRD) module | Joe Stevens, Donald Olgado, Alex Ko | 2003-02-11 |
| 6466426 | Method and apparatus for thermal control of a semiconductor substrate | Dmitry Lubomirsky, Dennis Koosau, Danny D. WANG, Senh Thach, Paul Exline | 2002-10-15 |
| 6178920 | Plasma reactor with internal inductive antenna capable of generating helicon wave | Yan Ye, Allan D'Ambra, Richard E. Remington, James E. Sammons, III | 2001-01-30 |
| 6158384 | Plasma reactor with multiple small internal inductive antennas | Yan Ye, Allan D'Ambra, Richard E. Remmington, James E. Sammons, III | 2000-12-12 |