Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8398832 | Coils for generating a plasma and for sputtering | Jaim Nulman, Sergio Edelstein, Mani Subramani, Zheng Xu, Avi Tepman +2 more | 2013-03-19 |
| 7422637 | Processing chamber configured for uniform gas flow | Vincent Ku, Ling Chen, Hua Chung | 2008-09-09 |
| 7138014 | Electroless deposition apparatus | Joseph Stevens, Dmitry Lubomirsky, Ian Pancham, Donald Olgado, Yeuk-Fai Edwin Mok | 2006-11-21 |
| 7048837 | End point detection for sputtering and resputtering | Sasson Somekh, Marc Schweitzer, John C. Forster, Zheng Xu, Roderick C. Mosely +1 more | 2006-05-23 |
| 6824612 | Electroless plating system | Joseph Stevens, Dmitry Lubomirsky, Ian Pancham, Donald Olgado, Yeuk-Fai Edwin Mok +1 more | 2004-11-30 |
| 6799939 | Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers | Robert B. Lowrance | 2004-10-05 |
| 6783639 | Coils for generating a plasma and for sputtering | Jaim Nulman, Sergio Edelstein, Mani Subramani, Zheng Xu, Avi Tepman +2 more | 2004-08-31 |
| 6640151 | Multi-tool control system, method and medium | Sasson Somekh | 2003-10-28 |
| 6575737 | Method and apparatus for improved substrate handling | Ilya Perlov, Alexey Goder, Evgueni Gantvarg | 2003-06-10 |
| 6486444 | Load-lock with external staging area | Kevin Fairbairn, Christopher T. Lane, Kelly Colborne | 2002-11-26 |
| 6468353 | Method and apparatus for improved substrate handling | Ilya Perlov, Alexey Goder, Eugene Gantvarg | 2002-10-22 |
| 6409890 | Method and apparatus for forming a uniform layer on a workpiece during sputtering | Zheng Xu, Praburam Gopalraja, John C. Forster, Ralf Hofmann, Anantha K. Subramani | 2002-06-25 |
| 6368469 | Coils for generating a plasma and for sputtering | Jaim Nulman, Sergio Edelstein, Mani Subramani, Zheng Xu, Avi Tepman +2 more | 2002-04-09 |
| 6254746 | Recessed coil for generating a plasma | Anantha K. Subramani, John C. Forster, Bradley O. Stimson, Sergio Edelstein, Avi Tepman +1 more | 2001-07-03 |
| 6102164 | Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers | William McClintock, Robert B. Lowrance | 2000-08-15 |
| 5879127 | Robot assembly | Robert B. Lowrance, Avi Tepman | 1999-03-09 |
| 5868847 | Clamp ring for shielding a substrate during film layer deposition | Aihua Chen, Zheng Xu, Avi Tepman, Igor Kogan | 1999-02-09 |
| 5857368 | Apparatus and method for fabricating metal paths in semiconductor substrates through high pressure extrusion | Stephen J. Blumenkranz, Eric C. Williams, Richard K. Reber | 1999-01-12 |
| 5810931 | High aspect ratio clamp ring | Joe Stevens, Igor Kogan | 1998-09-22 |
| 5763851 | Slotted RF coil shield for plasma deposition system | John C. Forster, Aihua Chen, Robert B. Lowrance, Ralf Hofmann, Zheng Xu +1 more | 1998-06-09 |
| 5690795 | Screwless shield assembly for vacuum processing chambers | Michael Rosenstein, Stephen Bruce Brodsky | 1997-11-25 |
| 5678980 | Robot assembly | Avi Tepman, Robert B. Lowrance | 1997-10-21 |
| 5656093 | Wafer spacing mask for a substrate support chuck and method of fabricating same | Vincent E. Burkhart, Michael Sugarman | 1997-08-12 |
| 5556248 | Semiconductor wafer cassette transfer system | — | 1996-09-17 |
| 5484011 | Method of heating and cooling a wafer during semiconductor processing | Avi Tepman, Dana L. Andrews | 1996-01-16 |