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Sputtered tungsten diffusion barrier for improved interconnect robustness |
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2005-01-04 |
| 6440808 |
Damascene-gate process for the fabrication of MOSFET devices with minimum poly-gate depletion, silicided source and drain junctions, and low sheet resistance gate-poly |
Diane C. Boyd, Hussein I. Hanafi, Ronnen Andrew Roy |
2002-08-27 |
| 6388327 |
Capping layer for improved silicide formation in narrow semiconductor structures |
Kenneth J. Giewont, Cyril Cabral, Jr., Anthony G. Domenicucci, Craig Ransom, Yun-Yu Wang +2 more |
2002-05-14 |
| 6323130 |
Method for self-aligned formation of silicide contacts using metal silicon alloys for limited silicon consumption and for reduction of bridging |
Cyril Cabral, Jr., Roy A. Carruthers, James M. E. Harper, Christian Lavoie, Patricia A. O'Neil +1 more |
2001-11-27 |
| 6245668 |
Sputtered tungsten diffusion barrier for improved interconnect robustness |
William J. Murphy, Matthew J. Rutten, David C. Strippe, Daniel S. Vanslette |
2001-06-12 |
| 6114736 |
Controlled dopant diffusion and metal contamination in thin polycide gate conductor of MOSFET device |
Karanam Balasubramanyam, Richard A. Conti, Badih El-Kareh |
2000-09-05 |
| 6049131 |
Device formed by selective deposition of refractory metal of less than 300 Angstroms of thickness |
Richard A. Conti, Seshadri Subbanna |
2000-04-11 |
| 5923999 |
Method of controlling dopant diffusion and metal contamination in thin polycide gate conductor of mosfet device |
Karanam Balasubramanyam, Richard A. Conti, Badih El-Kareh |
1999-07-13 |
| 5807788 |
Method for selective deposition of refractory metal and device formed thereby |
Richard A. Conti, Seshadri Subbanna |
1998-09-15 |
| 5690795 |
Screwless shield assembly for vacuum processing chambers |
Michael Rosenstein, Howard Grunes |
1997-11-25 |
| 5086016 |
Method of making semiconductor device contact including transition metal-compound dopant source |
Rajiv V. Joshi, John S. Lechaton, James G. Ryan, Dominic J. Schepis |
1992-02-04 |
| 4974056 |
Stacked metal silicide gate structure with barrier |
Dan Moy, Rajiv V. Joshi |
1990-11-27 |
| 4803110 |
Coated mask for photolithographic construction of electric circuits |
Kie Y. Ahn, Saryadevara Basavaiah, Charles A. Cortellino, Joseph E. Levine |
1989-02-07 |
