Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103288 | Transfer chamber metrology for improved device yield | David P. Bour, Alain Duboust | 2018-10-16 |
| 9076827 | Transfer chamber metrology for improved device yield | David P. Bour, Alain Duboust | 2015-07-07 |
| 7571017 | Intelligent data multiplexer | — | 2009-08-04 |
| 6721605 | Multi-computer chamber control system, method and medium | Mark Yam | 2004-04-13 |
| 6575737 | Method and apparatus for improved substrate handling | Ilya Perlov, Evgueni Gantvarg, Howard Grunes | 2003-06-10 |
| 6493681 | Method and system for visual analysis of investment strategies | Leonid M. Tertitski | 2002-12-10 |
| 6468353 | Method and apparatus for improved substrate handling | Ilya Perlov, Eugene Gantvarg, Howard Grunes | 2002-10-22 |
| 6424880 | Multi-computer chamber control system, method and medium | Mark Yam | 2002-07-23 |
| 6287386 | Carousel wafer transfer system | Ilya Perlov, Eugene Gantvarg | 2001-09-11 |
| 5951770 | Carousel wafer transfer system | Ilya Perlov, Eugene Gantvarg | 1999-09-14 |
| 5464982 | Respiratory gas analyzer | Steven J. Drucker, Davood Khalili, Kevin Gregg Williams, Ken Christensen, Emery Major | 1995-11-07 |