Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8079894 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Robert D. Tolles, Norman Shendon, Sasson Somekh, Ilya Perlov, Harry Q. Lee | 2011-12-20 |
| 7614939 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Robert D. Tolles, Norman Shendon, Sasson Somekh, Ilya Perlov, Harry Q. Lee | 2009-11-10 |
| 7255632 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Robert D. Tolles, Norm Shendon, Sasson Somekh, Ilya Perlov, Harry Q. Lee | 2007-08-14 |
| 7238090 | Polishing apparatus having a trough | Robert D. Tolles, Norm Shendon, Sasson Somekh, Ilya Perlov, Harry Q. Lee | 2007-07-03 |
| 7097544 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Robert D. Tolles, Norm Shendon, Sasson Somekh, Ilya Perlov, Harry Q. Lee | 2006-08-29 |
| 6896584 | Method of controlling carrier head with multiple chambers | Ilya Perlov, Sen-Hou Ko | 2005-05-24 |
| 6648740 | Carrier head with a flexible membrane to form multiple chambers | Ilya Perlov, Sen-Hou Ko | 2003-11-18 |
| 6532866 | Method and apparatus for orienting substrates | Ilya Perlov, Leonid M. Tertitski | 2003-03-18 |
| 6506104 | Carrier head with a flexible membrane | Ilya Perlov, Sen-Hou Ko | 2003-01-14 |
| 6468353 | Method and apparatus for improved substrate handling | Ilya Perlov, Alexey Goder, Howard Grunes | 2002-10-22 |
| 6393337 | Method and apparatus for orienting substrates | Ilya Perlov, Leonid M. Tertitski | 2002-05-21 |
| 6374508 | Apparatus and method for aligning a substrate on a support member | Joseph Yudovsky, Kenneth Tsai, Ilya Perlov | 2002-04-23 |
| 6293853 | Conditioner apparatus for chemical mechanical polishing | Ilya Perlov | 2001-09-25 |
| 6287386 | Carousel wafer transfer system | Ilya Perlov, Alexey Goder | 2001-09-11 |
| 6277010 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Ilya Perlov, Sen-Hou Ko | 2001-08-21 |
| 6146463 | Apparatus and method for aligning a substrate on a support member | Joseph Yudovsky, Kenneth Tsai, Ilya Perlov | 2000-11-14 |
| 6143127 | Carrier head with a retaining ring for a chemical mechanical polishing system | Ilya Perlov | 2000-11-07 |
| 6126517 | System for chemical mechanical polishing having multiple polishing stations | Robert D. Tolles, Norm Shendon, Sasson Somekh, Ilya Perlov, Harry Q. Lee | 2000-10-03 |
| 6106378 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Iiya Perlov, Sen-Hou Ko | 2000-08-22 |
| 6086457 | Washing transfer station in a system for chemical mechanical polishing | Ilya Perlov | 2000-07-11 |
| 6082951 | Wafer cassette load station | Eric A. Nering, Ilya Perlov, Victor Belitsky | 2000-07-04 |
| 6080046 | Underwater wafer storage and wafer picking for chemical mechanical polishing | Norm Shendon, Ilya Perlov, Harry Q. Lee, Robert D. Tolles, Sasson Somekh | 2000-06-27 |
| 6036583 | Conditioner head in a substrate polisher and method | Ilya Perlov | 2000-03-14 |
| 5964653 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Ilya Perlov, Sen-Hou Ko | 1999-10-12 |
| 5951770 | Carousel wafer transfer system | Ilya Perlov, Alexey Goder | 1999-09-14 |