Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7637707 | Apparatus for storing and moving a cassette | Ilya Perlov, Evgueni Gantvarg | 2009-12-29 |
| 7578647 | Load port configurations for small lot size substrate carriers | Martin R. Elliott, Michael R. Rice, Jeffrey C. Hudgens, Eric A. Englhardt | 2009-08-25 |
| 6379221 | Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system | Daniel F. Kennedy, Arul Shanmugasundram | 2002-04-30 |
| 6283692 | Apparatus for storing and moving a cassette | Ilya Perlov, Evgueni Gantvarg | 2001-09-04 |
| 6280299 | Combined slurry dispenser and rinse arm | Daniel F. Kennedy, Boris Fuksshimov, Boris Fishkin, Kyle Brown, Tom Osterheld +2 more | 2001-08-28 |
| 6139406 | Combined slurry dispenser and rinse arm and method of operation | Daniel F. Kennedy, Boris Fuksshimov, Boris Fishkin, Kyle Brown, Tom Osterheld +2 more | 2000-10-31 |
| 6082951 | Wafer cassette load station | Eric A. Nering, Ilya Perlov, Eugene Gantvarg | 2000-07-04 |
| 5899801 | Method and apparatus for removing a substrate from a polishing pad in a chemical mechanical polishing system | Robert D. Tolles, James Nystrom, Jeffrey Marks, William R. Bartlett | 1999-05-04 |