| 7637707 |
Apparatus for storing and moving a cassette |
Ilya Perlov, Evgueni Gantvarg |
2009-12-29 |
| 7578647 |
Load port configurations for small lot size substrate carriers |
Martin R. Elliott, Michael R. Rice, Jeffrey C. Hudgens, Eric A. Englhardt |
2009-08-25 |
| 6379221 |
Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system |
Daniel F. Kennedy, Arul Shanmugasundram |
2002-04-30 |
| 6283692 |
Apparatus for storing and moving a cassette |
Ilya Perlov, Evgueni Gantvarg |
2001-09-04 |
| 6280299 |
Combined slurry dispenser and rinse arm |
Daniel F. Kennedy, Boris Fuksshimov, Boris Fishkin, Kyle Brown, Tom Osterheld +2 more |
2001-08-28 |
| 6139406 |
Combined slurry dispenser and rinse arm and method of operation |
Daniel F. Kennedy, Boris Fuksshimov, Boris Fishkin, Kyle Brown, Tom Osterheld +2 more |
2000-10-31 |
| 6082951 |
Wafer cassette load station |
Eric A. Nering, Ilya Perlov, Eugene Gantvarg |
2000-07-04 |
| 5899801 |
Method and apparatus for removing a substrate from a polishing pad in a chemical mechanical polishing system |
Robert D. Tolles, James Nystrom, Jeffrey Marks, William R. Bartlett |
1999-05-04 |
