| 6530734 |
Methods and apparatus for positive wafer process status identification during semiconductor wafer processing |
— |
2003-03-11 |
| 6524051 |
Wafer positioning device with storage capability |
— |
2003-02-25 |
| 6448537 |
Single-wafer process chamber thermal convection processes |
— |
2002-09-10 |
| 6309163 |
Wafer positioning device with storage capability |
— |
2001-10-30 |
| 6280134 |
Apparatus and method for automated cassette handling |
— |
2001-08-28 |
| 6270306 |
Wafer aligner in center of front end frame of vacuum system |
Robert Otwell, Bryan Von Lossberg |
2001-08-07 |
| 6082951 |
Wafer cassette load station |
Ilya Perlov, Eugene Gantvarg, Victor Belitsky |
2000-07-04 |
| 6050891 |
Vacuum processing system with turbo-axial fan in clean-air supply system of front end environment |
— |
2000-04-18 |
| 5784238 |
Coordinated cluster tool energy delivery system |
Dan Fleming |
1998-07-21 |
| 4679268 |
Method and apparatus for burning solid waste products using a plurality of multiple hearth furnaces |
Richard M. Gurries, Jay K. Johnson |
1987-07-14 |
