Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6530734 | Methods and apparatus for positive wafer process status identification during semiconductor wafer processing | — | 2003-03-11 |
| 6524051 | Wafer positioning device with storage capability | — | 2003-02-25 |
| 6448537 | Single-wafer process chamber thermal convection processes | — | 2002-09-10 |
| 6309163 | Wafer positioning device with storage capability | — | 2001-10-30 |
| 6280134 | Apparatus and method for automated cassette handling | — | 2001-08-28 |
| 6270306 | Wafer aligner in center of front end frame of vacuum system | Robert Otwell, Bryan Von Lossberg | 2001-08-07 |
| 6082951 | Wafer cassette load station | Ilya Perlov, Eugene Gantvarg, Victor Belitsky | 2000-07-04 |
| 6050891 | Vacuum processing system with turbo-axial fan in clean-air supply system of front end environment | — | 2000-04-18 |
| 5784238 | Coordinated cluster tool energy delivery system | Dan Fleming | 1998-07-21 |
| 4679268 | Method and apparatus for burning solid waste products using a plurality of multiple hearth furnaces | Richard M. Gurries, Jay K. Johnson | 1987-07-14 |