Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6270306 | Wafer aligner in center of front end frame of vacuum system | Eric A. Nering, Bryan Von Lossberg | 2001-08-07 |
| 6238161 | Cost effective modular-linear wafer processing | Thomas I. Kirkpatrick | 2001-05-29 |
| 6196532 | 3 point vacuum chuck with non-resilient support members | — | 2001-03-06 |
| 6053687 | Cost effective modular-linear wafer processing | Thomas I. Kirkpatrick | 2000-04-25 |