Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6270306 | Wafer aligner in center of front end frame of vacuum system | Eric A. Nering, Bryan Von Lossberg | 2001-08-07 | $53,916,000 |
| 6238161 | Cost effective modular-linear wafer processing | Thomas I. Kirkpatrick | 2001-05-29 | $105,746,000 |
| 6196532 | 3 point vacuum chuck with non-resilient support members | — | 2001-03-06 | $102,443,000 |
| 6053687 | Cost effective modular-linear wafer processing | Thomas I. Kirkpatrick | 2000-04-25 | $129,479,000 |