| 8079894 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion |
Robert D. Tolles, Norman Shendon, Sasson Somekh, Eugene Gantvarg, Harry Q. Lee |
2011-12-20 |
$23,410,000 |
| 7637707 |
Apparatus for storing and moving a cassette |
Evgueni Gantvarg, Victor Belitsky |
2009-12-29 |
$18,530,000 |
| 7614939 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion |
Robert D. Tolles, Norman Shendon, Sasson Somekh, Eugene Gantvarg, Harry Q. Lee |
2009-11-10 |
$38,857,000 |
| 7255632 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion |
Robert D. Tolles, Norm Shendon, Sasson Somekh, Eugene Gantvarg, Harry Q. Lee |
2007-08-14 |
$16,337,000 |
| 7238090 |
Polishing apparatus having a trough |
Robert D. Tolles, Norm Shendon, Sasson Somekh, Eugene Gantvarg, Harry Q. Lee |
2007-07-03 |
$46,647,000 |
| 7097544 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion |
Robert D. Tolles, Norm Shendon, Sasson Somekh, Eugene Gantvarg, Harry Q. Lee |
2006-08-29 |
$18,591,000 |
| 6896584 |
Method of controlling carrier head with multiple chambers |
Eugene Gantvarg, Sen-Hou Ko |
2005-05-24 |
$9,995,000 |
| 6648740 |
Carrier head with a flexible membrane to form multiple chambers |
Eugene Gantvarg, Sen-Hou Ko |
2003-11-18 |
$51,686,000 |
| 6575737 |
Method and apparatus for improved substrate handling |
Alexey Goder, Evgueni Gantvarg, Howard Grunes |
2003-06-10 |
$35,747,000 |
| 6532866 |
Method and apparatus for orienting substrates |
Eugene Gantvarg, Leonid M. Tertitski |
2003-03-18 |
$24,651,000 |
| 6506104 |
Carrier head with a flexible membrane |
Eugene Gantvarg, Sen-Hou Ko |
2003-01-14 |
$32,327,000 |
| 6468353 |
Method and apparatus for improved substrate handling |
Alexey Goder, Eugene Gantvarg, Howard Grunes |
2002-10-22 |
$32,970,000 |
| 6393337 |
Method and apparatus for orienting substrates |
Eugene Gantvarg, Leonid M. Tertitski |
2002-05-21 |
$35,703,000 |
| 6374508 |
Apparatus and method for aligning a substrate on a support member |
Joseph Yudovsky, Kenneth Tsai, Eugene Gantvarg |
2002-04-23 |
$30,581,000 |
| 6293853 |
Conditioner apparatus for chemical mechanical polishing |
Eugene Gantvarg |
2001-09-25 |
$195,285,000 |
| 6287386 |
Carousel wafer transfer system |
Alexey Goder, Eugene Gantvarg |
2001-09-11 |
|
| 6283692 |
Apparatus for storing and moving a cassette |
Evgueni Gantvarg, Victor Belitsky |
2001-09-04 |
$82,822,000 |
| 6277010 |
Carrier head with a flexible membrane for a chemical mechanical polishing system |
Eugene Gantvarg, Sen-Hou Ko |
2001-08-21 |
$32,126,000 |
| 6167834 |
Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process |
David N. Wang, John M. White, Kam S. Law, Cissy Leung, Salvador P. Umotoy +3 more |
2001-01-02 |
$117,838,000 |
| 6146463 |
Apparatus and method for aligning a substrate on a support member |
Joseph Yudovsky, Kenneth Tsai, Eugene Gantvarg |
2000-11-14 |
$66,218,000 |
| 6143127 |
Carrier head with a retaining ring for a chemical mechanical polishing system |
Eugene Gantvarg |
2000-11-07 |
$84,992,000 |
| 6126517 |
System for chemical mechanical polishing having multiple polishing stations |
Robert D. Tolles, Norm Shendon, Sasson Somekh, Eugene Gantvarg, Harry Q. Lee |
2000-10-03 |
$78,095,000 |
| 6103014 |
Chemical vapor deposition chamber |
Lawrence Chung-Lai Lei, Karl A. Littau, Alan F. Morrison, Mei Chang, Ashok Sinha |
2000-08-15 |
$106,756,000 |
| 6086457 |
Washing transfer station in a system for chemical mechanical polishing |
Eugene Gantvarg |
2000-07-11 |
$109,336,000 |
| 6082951 |
Wafer cassette load station |
Eric A. Nering, Eugene Gantvarg, Victor Belitsky |
2000-07-04 |
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