Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10280509 | Lid assembly for a processing system to facilitate sequential deposition techniques | Gwo-Chuan Tzu | 2019-05-07 |
| 9587310 | Lid assembly for a processing system to facilitate sequential deposition techniques | Gwo-Chuan Tzu | 2017-03-07 |
| 9017776 | Apparatuses and methods for atomic layer deposition | Hyman Lam, Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan +2 more | 2015-04-28 |
| 8821637 | Temperature controlled lid assembly for tungsten nitride deposition | Avgerinos V. Gelatos, Sang-Hyeob Lee, Xiaoxiong Yuan, Yu Chang, Gwo-Chuan Tzu +4 more | 2014-09-02 |
| 8747556 | Apparatuses and methods for atomic layer deposition | Hyman Lam, Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan +2 more | 2014-06-10 |
| 8342119 | Self aligning non contact shadow ring process kit | Joseph Yudovsky, Lawrence Chung-Lai Lei, Tom Madar, Girish Dixit, Gwo-Chuan Tzu | 2013-01-01 |
| 8291857 | Apparatuses and methods for atomic layer deposition | Hyman Lam, Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan +2 more | 2012-10-23 |
| 8293015 | Apparatuses and methods for atomic layer deposition | Hyman Lam, Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan +2 more | 2012-10-23 |
| 8231431 | Solar panel edge deletion module | Dhruv Gajaria, Zhiyong Li, Gopalakrishna B. Prabhu, Yacov Elgar, John Visitacion +8 more | 2012-07-31 |
| 8123860 | Apparatus for cyclical depositing of thin films | Randhir P. S. Thakur, Alfred Mak, Ming Xi, Walter Glenn, Ahmad Khan +2 more | 2012-02-28 |
| 7905959 | Lid assembly for a processing system to facilitate sequential deposition techniques | Gwo-Chuan Tzu | 2011-03-15 |
| 7705275 | Substrate support having brazed plates and resistance heater | Lawrence Chung-Lai Lei, Gwo-chun Tzu, Xiangxiong (John) Yuan, Michael S. Jackson, Hymam Lam | 2010-04-27 |
| 7175713 | Apparatus for cyclical deposition of thin films | Randhir P. S. Thakur, Alfred Mak, Ming Xi, Walter Glenn, Ahmad Khan +2 more | 2007-02-13 |
| 6878206 | Lid assembly for a processing system to facilitate sequential deposition techniques | Gwo-Chuan Tzu | 2005-04-12 |
| 6827815 | Showerhead assembly for a processing chamber | Mark Hytros, Truc T. Tran, Hongbee Teoh, Lawrence Chung-Lai Lei, Avgerinos V. Gelatos | 2004-12-07 |
| 6767176 | Lift pin actuating mechanism for semiconductor processing chamber | Joseph Yudovsky | 2004-07-27 |
| 6730175 | Ceramic substrate support | Joseph Yudovsky, Shamouil Shamouilian, Ron Rose, Rita Dukes, Xiaoxiong Yuan | 2004-05-04 |
| 6603269 | Resonant chamber applicator for remote plasma source | Be Van Vo, Son Trinh, Lawrence Chung-Lai Lei, Sergio Edelstein, Avi Tepman +2 more | 2003-08-05 |
| 6589352 | Self aligning non contact shadow ring process kit | Joseph Yudovsky, Lawrence Chung-Lai Lei, Tom Madar, Girish Dixit, Gwo-Chuan Tzu | 2003-07-08 |
| 6521292 | Substrate support including purge ring having inner edge aligned to wafer edge | Joseph Yudovsky, Thomas Madar | 2003-02-18 |
| 6517592 | Cold trap assembly | Lawrence Chung-Lai Lei, Russell C. Ellwanger, Ronald L. Rose, Joel M. Huston, James Jin-Long Chen | 2003-02-11 |
| 6503331 | Tungsten chamber with stationary heater | Joseph Yudovsky, Lawrence Chung-Lai Lei | 2003-01-07 |
| 6461435 | Showerhead with reduced contact area | Karl A. Littau, Bevan Vo, Son Trinh, Chien-Teh Kao, Ken Kaung Lai +4 more | 2002-10-08 |
| 6379466 | Temperature controlled gas distribution plate | Turgut Sahin, Avi Tepman, Ronald L. Rose | 2002-04-30 |
| 6375748 | Method and apparatus for preventing edge deposition | Joseph Yudovsky, Tom Madar, Son Trinh, Lawrence Chung-Lai Lei, Anzhong Chang +1 more | 2002-04-23 |