Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7779784 | Apparatus and method for plasma assisted deposition | Chen-An Chen, Avgerinos V. Gelatos, Michael Yang, Ming Xi | 2010-08-24 |
| 6998014 | Apparatus and method for plasma assisted deposition | Chen-An Chen, Avgerinos V. Gelatos, Michael Yang, Ming Xi | 2006-02-14 |
| 6827815 | Showerhead assembly for a processing chamber | Truc T. Tran, Hongbee Teoh, Lawrence Chung-Lai Lei, Avgerinos V. Gelatos, Salvador P. Umotoy | 2004-12-07 |