Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6603269 | Resonant chamber applicator for remote plasma source | Salvador P. Umotoy, Son Trinh, Lawrence Chung-Lai Lei, Sergio Edelstein, Avi Tepman +2 more | 2003-08-05 |
| 6364954 | High temperature chemical vapor deposition chamber | Salvador P. Umotoy, Steve H. Chiao, Anh N. Nguyen, Joel M. Huston, James Jin-Long Chen +1 more | 2002-04-02 |