Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11955362 | Substrate support for reduced damage substrate backside | Cheng-Hsiung Tsai, Gwo-Chuan Tzu | 2024-04-09 |
| 11598003 | Substrate processing chamber having heated showerhead assembly | Faruk Gungor, Dien-Yeh Wu, Mei Chang, Xiaoxiong Yuan, Kazuya Daito +4 more | 2023-03-07 |
| 10879090 | High temperature process chamber lid | Ilker Durukan, Dien-Yeh Wu, Chien-Teh Kao, Mei Chang | 2020-12-29 |
| 10593539 | Support assembly | Chien-Teh Kao, Mei Chang, Xiaoxiong Yuan | 2020-03-17 |
| 10400335 | Dual-direction chemical delivery system for ALD/CVD chambers | Zhenbin Ge, Chien-Teh Kao, Mei Chang | 2019-09-03 |
| 9837250 | Hot wall reactor with cooled vacuum containment | Olkan Cuvalci, Michael P. Karazim, Joseph Yudovsky | 2017-12-05 |
| 9831109 | High temperature process chamber lid | Ilker Durukan, Dien-Yeh Wu, Chien-Teh Kao, Mei Chang | 2017-11-28 |
| 9765432 | Dual-direction chemical delivery system for ALD/CVD chambers | Zhenbin Ge, Chien-Teh Kao, Mei Chang | 2017-09-19 |
| 9627185 | Methods and apparatus for in-situ cleaning of a process chamber | Nicholas R. Denny, Chien-Teh Kao | 2017-04-18 |
| 9543186 | Substrate support with controlled sealing gap | Olkan Cuvalci, Gwo-Chuan Tzu | 2017-01-10 |
| 9353440 | Dual-direction chemical delivery system for ALD/CVD chambers | Zhenbin Ge, Chien-Teh Kao, Mei Chang | 2016-05-31 |
| 8846163 | Method for removing oxides | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Son Trinh +6 more | 2014-09-30 |
| 8343307 | Showerhead assembly | — | 2013-01-01 |
| 8216374 | Gas coupler for substrate processing chamber | Jeffery Tobin, Christophe Marcadal | 2012-07-10 |
| 7910853 | Direct real-time monitoring and feedback control of RF plasma output for wafer processing | David T. Or, Yu-Tzu Chang, William Kuang, Chien-Teh Kao, Mei Chang | 2011-03-22 |
| 7777483 | Method and apparatus for measuring a thickness of a layer of a wafer | Lawrence Chung-Lai Lei, Siqing Lu, Yu-Chia Chang, Cecilia Martner, Quyen Pham +3 more | 2010-08-17 |
| 7767024 | Method for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Son Trinh +6 more | 2010-08-03 |
| 7520957 | Lid assembly for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Son Trinh +6 more | 2009-04-21 |
| 7396480 | Method for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Son Trinh +6 more | 2008-07-08 |
| 7355394 | Apparatus and method of dynamically measuring thickness of a layer of a substrate | Lawrence Chung-Lai Lei, Siqing Lu, Yu-Chia Chang, Cecilia Martner, Quyen Pham +3 more | 2008-04-08 |
| 7112961 | Method and apparatus for dynamically measuring the thickness of an object | Lawrence Chung-Lai Lei, Siqing Lu, Yu-Chia Chang, Cecilia Martner, Quyen Pham +3 more | 2006-09-26 |
| 6926774 | Piezoelectric vaporizer | Ted G. Yoshidome | 2005-08-09 |
| 6517592 | Cold trap assembly | Salvador P. Umotoy, Lawrence Chung-Lai Lei, Russell C. Ellwanger, Ronald L. Rose, James Jin-Long Chen | 2003-02-11 |
| 6364954 | High temperature chemical vapor deposition chamber | Salvador P. Umotoy, Steve H. Chiao, Anh N. Nguyen, Be Van Vo, James Jin-Long Chen +1 more | 2002-04-02 |
| 6332601 | Liquid vaporizers for semiconductor processing systems | Fufa Chen | 2001-12-25 |