Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6517592 | Cold trap assembly | Salvador P. Umotoy, Lawrence Chung-Lai Lei, Russell C. Ellwanger, Ronald L. Rose, Joel M. Huston | 2003-02-11 |
| 6364954 | High temperature chemical vapor deposition chamber | Salvador P. Umotoy, Steve H. Chiao, Anh N. Nguyen, Be Van Vo, Joel M. Huston +1 more | 2002-04-02 |
| 6206971 | Integrated temperature controlled exhaust and cold trap assembly | Salvador P. Umotoy, Lawrence Chung-Lai Lei, Russell C. Ellwanger, Ronald L. Rose, Joel M. Huston | 2001-03-27 |
| 6176930 | Apparatus and method for controlling a flow of process material to a deposition chamber | Keith Kuang-Kuo Koai, Tung-Ching Tseng, Mark S. Johnson, John V. Schmitt, Sean Li | 2001-01-23 |
| 6110322 | Prevention of ground fault interrupts in a semiconductor processing system | Hong Teoh, Cuong Cao Nguyen, Hanh Nguyen | 2000-08-29 |
| 6086676 | Programmable electrical interlock system for a vacuum processing system | Yeh-Jen Kao, Fufa Chen | 2000-07-11 |