Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851266 | A-frame rack systems for transporting glass sheets | Robert J. Carlson, Mike Walker, Brock Walker, Bill Coppage | 2023-12-26 |
| 6596085 | Methods and apparatus for improved vaporization of deposition material in a substrate processing system | Shih-Hung Li, Christophe Marcadal, Anzhong Chang, Ling Chen | 2003-07-22 |
| 6498898 | Uniform heat trace and secondary containment for delivery lines for processing system | — | 2002-12-24 |
| 6402806 | Method for unreacted precursor conversion and effluent removal | Ling Chen, George Michael Bleyle, Yu D. Cong, Alfred Mak, Mei Chang | 2002-06-11 |
| 6358323 | Method and apparatus for improved control of process and purge material in a substrate processing system | Frank Chang, Xin Guo, Ling Chen, Christophe Marcadal | 2002-03-19 |
| 6251759 | Method and apparatus for depositing material upon a semiconductor wafer using a transition chamber of a multiple chamber semiconductor wafer processing system | Xin Sheng Guo, Shih-Hung Li | 2001-06-26 |
| 6202656 | Uniform heat trace and secondary containment for delivery lines for processing system | — | 2001-03-20 |
| 6179925 | Method and apparatus for improved control of process and purge material in substrate processing system | Bo Zheng, Mei Chang, Stephen Voss | 2001-01-30 |
| 6176930 | Apparatus and method for controlling a flow of process material to a deposition chamber | Keith Kuang-Kuo Koai, Tung-Ching Tseng, James Jin-Long Chen, Mark S. Johnson, Sean Li | 2001-01-23 |
| 6099649 | Chemical vapor deposition hot-trap for unreacted precursor conversion and effluent removal | Ling Chen, George Michael Bleyle, Yu D. Cong, Alfred Mak, Mei Chang | 2000-08-08 |
| 6098964 | Method and apparatus for monitoring the condition of a vaporizer for generating liquid chemical vapor | — | 2000-08-08 |
| 6038919 | Measurement of quantity of incompressible substance in a closed container | Richard A. Marsh | 2000-03-21 |
| 5981295 | Ampule with integral filter | — | 1999-11-09 |
| 5972117 | Method and apparatus for monitoring generation of liquid chemical vapor | — | 1999-10-26 |
| 5879947 | Apparatus and method for detecting DMAH using particle sensing detector | — | 1999-03-09 |