Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532459 | Chemical vapor deposition apparatus with cleaning gas flow guiding member | Chih-hung Yeh, Tsung-Lin Lee, Yi-Ming Lin, Sheng-chun Yang | 2022-12-20 |
| 11315810 | Apparatus for wafer processing | Sung-Po Yang, Feng-Tao Lee, Shih-Fang Chen | 2022-04-26 |
| 10121698 | Method of manufacturing a semiconductor device | Hsiang-Huan Lee, Shau-Lin Shue, Kuang-Kuo Koai, Hai-Ching Chen, Wen-Cheng Yang +3 more | 2018-11-06 |
| 9548241 | Semiconductor device metallization systems and methods | Hsiang-Huan Lee, Shau-Lin Shue, Keith Kuang-Kuo Koai, Hai-Ching Chen, Wen-Cheng Yang +3 more | 2017-01-17 |
| 9318364 | Semiconductor device metallization systems and methods | Hsiang-Huan Lee, Shau-Lin Shue, Keith Kuang-Kuo Koai, Hai-Ching Chen, Wen-Cheng Yang +3 more | 2016-04-19 |
| 7297632 | Scratch reduction for chemical mechanical polishing | Chuang-Ping Hou, Syun-Ming Jang, Ying-Ho Chen, Chu-Yun Fu | 2007-11-20 |
| 7109117 | Method for chemical mechanical polishing of a shallow trench isolation structure | Syun-Ming Jang, Li-Jia Yang, Chuan-Ping Hou | 2006-09-19 |
| 7016790 | In-line hot-wire sensor for slurry monitoring | Li-Jia Yang | 2006-03-21 |
| 6930040 | Method of forming a contact on a silicon-on-insulator wafer | Chuan-Ping Hou, Syun-Ming Jang, Ying-Ho Chen | 2005-08-16 |
| 6812069 | Method for improving semiconductor process wafer CMP uniformity while avoiding fracture | Syun-Ming Jang, Chih-Hsiang Yao | 2004-11-02 |
| 6686284 | Chemical mechanical polisher equipped with chilled retaining ring and method of using | Chi-Wei Chung, Tsu Shih, Syun-Ming Jang | 2004-02-03 |
| 6579150 | Dual detection method for end point in chemical mechanical polishing | — | 2003-06-17 |
| 6579151 | Retaining ring with active edge-profile control by piezoelectric actuator/sensors | Sheng-Yung Liu | 2003-06-17 |
| 6176930 | Apparatus and method for controlling a flow of process material to a deposition chamber | Keith Kuang-Kuo Koai, James Jin-Long Chen, Mark S. Johnson, John V. Schmitt, Sean Li | 2001-01-23 |