Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315810 | Apparatus for wafer processing | Tung-Ching Tseng, Feng-Tao Lee, Shih-Fang Chen | 2022-04-26 |
| 8872138 | Gas delivery for uniform film properties at UV curing chamber | Yu Lu, Ding-I Liu, Kuo-Shu Tseng, Chung-Wen Chang | 2014-10-28 |