Issued Patents All Time
Showing 1–25 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354908 | Amorphous layers for reducing copper diffusion and method forming same | Jyh-Nan Lin, Chia-Yu Wu, Kai-Shiung Hsu | 2025-07-08 |
| 12354907 | Electron migration control in interconnect structures | Chun-Jen Chen, Kai-Shiung Hsu, Jyh-Nan Lin | 2025-07-08 |
| 12148656 | Method of manufacturing semiconductor device and semiconductor devices | Hsiao-Min Chen, Jyh-Nan Lin, Kai-Shiung Hsu | 2024-11-19 |
| 12020905 | Method of using high density plasma chemical vapor deposition chamber | Wei Wu, Wen-Long Lee | 2024-06-25 |
| 12020947 | Method of manufacturing semiconductor devices and semiconductor devices | Hui HAN, Yuh-Ta Fan, Kai-Shiung Hsu | 2024-06-25 |
| 11967522 | Amorphous layers for reducing copper diffusion and method forming same | Jyh-Nan Lin, Chia-Yu Wu, Kai-Shiung Hsu | 2024-04-23 |
| 11742393 | Semiconductor device having a multi-layer diffusion barrier and method of making the same | Jyh-Nan Lin, Yuh-Ta Fan | 2023-08-29 |
| 11342164 | High density plasma chemical vapor deposition chamber and method of using | Wei Wu, Wen-Long Lee | 2022-05-24 |
| 11322397 | Method of manufacturing semiconductor devices including formation of adhesion enhancement layer | Hsiao-Min Chen, Jyh-Nan Lin, Kai-Shiung Hsu | 2022-05-03 |
| 11315829 | Amorphous layers for reducing copper diffusion and method forming same | Jyh-Nan Lin, Chia-Yu Wu, Kai-Shiung Hsu | 2022-04-26 |
| 11264467 | Semiconductor device having multi-layer diffusion barrier and method of making the same | Jyh-Nan Lin, Yuh-Ta Fan | 2022-03-01 |
| 11264273 | Electron migration control in interconnect structures | Chun-Jen Chen, Kai-Shiung Hsu, Jyh-Nan Lin | 2022-03-01 |
| 11194259 | Equipment module with enhanced protection from airborne contaminants, and method of operation | Chih-Chiang Chiu, Yu Lu | 2021-12-07 |
| 11069534 | Method of manufacturing semiconductor devices and semiconductor devices | Hui HAN, Yuh-Ta Fan, Kai-Shiung Hsu | 2021-07-20 |
| 10978337 | Aluminum-containing layers and methods of forming the same | Jyh-Nan Lin, Mu-Min Hung, Kai-Shiung Hsu | 2021-04-13 |
| 10910199 | Method of controlling an adjustable nozzle and method of making a semiconductor device | Wei Wu, Wen-Long Lee | 2021-02-02 |
| 10864530 | Coating apparatus and method of forming coating film | Lan-Hai Wang, Yong-Hung Yang, Si-Wen Liao, Po-Hsiung Leu, Mao-Cheng Lin | 2020-12-15 |
| 10867838 | Semiconductor device having a shallow trench isolation structure and methods of forming the same | Chun-Li Lin, Yl-Fang Li, Geng-Shuoh Chang, Chun-Sheng Wu, Po-Hsiung Leu | 2020-12-15 |
| 10867787 | Method for controlling plasma in semiconductor fabrication | Cheng-Tsung Wu, Po-Hsiung Leu, Si-Wen Liao, Hsiang-Sheng Kung | 2020-12-15 |
| 10749004 | Semiconductor device having a multi-layer diffusion barrier | Jyh-Nan Lin, Yuh-Ta Fan | 2020-08-18 |
| 10724140 | Thermal chemical vapor deposition system and operating method thereof | Yen-Chan Lo, Yi-Fang Lai, Po-Hsiung Leu, Si-Wen Liao, Kai-Shiung Hsu +4 more | 2020-07-28 |
| 10626499 | Deposition device structure | Yen-Chan Lo, Huan-Chieh Chen, Yi-Fang Lai, Keith Kuang-Kuo Koai, Chin-Feng Sun +2 more | 2020-04-21 |
| 10533252 | Showerhead, semicondcutor processing apparatus having the same and semiconductor process | Chih-Chiang Chiu, Chin-Feng Lin, Po-Hsiung Leu | 2020-01-14 |
| 10395918 | Method and system for controlling plasma in semiconductor fabrication | Cheng-Tsung Wu, Po-Hsiung Leu, Si-Wen Liao, Hsiang-Sheng Kung | 2019-08-27 |
| 10164063 | Semiconductor structure with protection layer | Chih-Wei Chiang, Po-Hsiung Leu | 2018-12-25 |