Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161041 | Thermal chemical vapor deposition system and operating method thereof | Yen-Chan Lo, Yi-Fang Lai, Po-Hsiung Leu, Si-Wen Liao, Kai-Shiung Hsu +4 more | 2018-12-25 |
| 9953861 | Semiconductor device having a shallow trench isolation structure and methods of forming the same | Chun-Li Lin, Yi Li, Geng-Shuoh Chang, Chun-Sheng Wu, Po-Hsiung Leu | 2018-04-24 |
| 9941100 | Adjustable nozzle for plasma deposition and a method of controlling the adjustable nozzle | Wei Wu, Wen-Long Lee | 2018-04-10 |
| 9859137 | Substrate heat treatment apparatus and heat treatment method | Chun-Cha Kuo, Wen-Long Lee, Tzu-Chien Cheng | 2018-01-02 |
| 9859113 | Structure and method of semiconductor device structure with gate | Jing Li, Chun-Sheng Wu, Yi Li | 2018-01-02 |
| 9831307 | Gap fill self planarization on post EPI | Po-Chang Chen, Po-Hsiung Leu | 2017-11-28 |
| 9716044 | Interlayer dielectric structure with high aspect ratio process (HARP) | Jen-Chi Chang, Chun-Li Lin, Kai-Shiung Hsu, Ming-Shiou Kuo, Wen-Long Lee +1 more | 2017-07-25 |
| 9631273 | Apparatus for dielectric deposition process | Lan-Hai Wang, Si-Wen Liao, Po-Hsiung Leu, Yong-Hung Yang | 2017-04-25 |
| 9607809 | High density plasma reactor with multiple top coils | Chi-Ching Lo, Po-Hsiung Leu, Tzu-Chun LIN, Jen-Chi Chang, Ho-Ta Chuang | 2017-03-28 |
| 9607873 | Apparatus and operation method thereof | Si-Wen Liao, Jia Wei Xu, Mao-Cheng Lin, Chien-Cheng Wu, Lan-Hai Wang +1 more | 2017-03-28 |
| 9573144 | Coating apparatus and method of forming coating film | Lan-Hai Wang, Yong-Hung Yang, Si-Wen Liao, Po-Hsiung Leu, Mao-Cheng Lin | 2017-02-21 |
| 9536771 | Gap fill self planarization on post EPI | Po-Chang Chen, Po-Hsiung Leu | 2017-01-03 |
| 9490152 | Asymmetrical chamber configuration | Lan-Hai Wang, Si-Wen Liao, Yong-Hung Yang, Jia-Wei Hsu | 2016-11-08 |
| 9324559 | Thin film deposition apparatus with multi chamber design and film deposition methods | Lan-Hai Wang, Si-Wen Liao, Po-Hsiung Leu, Yong-Hung Yang, Chia-Ming Tai | 2016-04-26 |
| 9209071 | Semiconductor structure with anti-etch structure in via and method for manufacturing the same | Geng-Shuoh Chang, Chun-Sheng Wu, Chun-Li Lin, Yi Li, Po-Hsiung Leu | 2015-12-08 |
| 9048185 | Profile pre-shaping for replacement poly gate interlayer dielectric | Chih-Wei Chiang, Kuang-Cheng Wu, Wen-Long Lee, Po-Hsiung Leu | 2015-06-02 |
| 8946095 | Method of forming interlayer dielectric film above metal gate of semiconductor device | Li-Jui Chen, Jyh-Nan Lin, Chin-Feng Sun, Po-Hsiung Leu | 2015-02-03 |
| 8884404 | Mechanism of patterning a semiconductor device and product resulting therefrom | Yi Li, Chun-Li Lin, Chun-Sheng Wu | 2014-11-11 |
| 8872138 | Gas delivery for uniform film properties at UV curing chamber | Yu Lu, Sung-Po Yang, Kuo-Shu Tseng, Chung-Wen Chang | 2014-10-28 |
| 8803249 | Profile pre-shaping for replacement poly gate interlayer dielectric | Chih-Wei Chiang, Kuang-Cheng Wu, Wen-Long Lee, Po-Hsiung Leu | 2014-08-12 |