Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607809 | High density plasma reactor with multiple top coils | Po-Hsiung Leu, Tzu-Chun LIN, Ding-I Liu, Jen-Chi Chang, Ho-Ta Chuang | 2017-03-28 |
| 7102871 | Electrostatic chuck assembly having disassembling device | Cheng-Liang Chang, Ray Chuang, Jen Wei, Chian-Kuo Huang, Huan-Wen Lai +4 more | 2006-09-05 |