Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982340 | Shower head apparatus and method for controlling plasma or gas distribution | Chih-Tsung Lee, Hung Jui Chang, You-Hua Chou, Shiu-Ko JangJian, Chung-En Kao +1 more | 2018-05-29 |
| 7102871 | Electrostatic chuck assembly having disassembling device | Cheng-Liang Chang, Ray Chuang, Jen Wei, Chian-Kuo Huang, Ching-Sun Lee +4 more | 2006-09-05 |