Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12226807 | Cleaning device for cleaning electroplating substrate holder | Yu-Young Wang, Victor Lu | 2025-02-18 |
| 11433440 | Cleaning device for cleaning electroplating substrate holder | Yu-Young Wang, Victor Lu | 2022-09-06 |
| 11230791 | Magnetic structure for metal plating control | Ming-Chin Tsai, Victor Lu | 2022-01-25 |
| 11111910 | Ultra high vacuum cryogenic pumping apparatus with nanostructure material | Surendra Babu Anantharaman, Wen-Cheng Yang, Victor Lu, Wei-Kuo Chin | 2021-09-07 |
| 10526719 | Magnetic structure for metal plating control | Ming-Chin Tsai, Victor Lu | 2020-01-07 |
| 10307798 | Cleaning device for cleaning electroplating substrate holder | Yu-Young Wang, Victor Lu | 2019-06-04 |
| 10190209 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Ming-Chin Tsai, You-Hua Chou, Chen-Chia Chiang, Chih-Tsung Lee, Ming-Shiou Kuo | 2019-01-29 |
| 10145371 | Ultra high vacuum cryogenic pumping apparatus with nanostructure material | Surendra Babu Anantharaman, Wen-Cheng Yang, Victor Lu, Wei-Kuo Chin | 2018-12-04 |
| 10121698 | Method of manufacturing a semiconductor device | Hsiang-Huan Lee, Shau-Lin Shue, Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng +3 more | 2018-11-06 |
| 9982340 | Shower head apparatus and method for controlling plasma or gas distribution | Chih-Tsung Lee, Hung Jui Chang, You-Hua Chou, Shiu-Ko JangJian, Ming-Chin Tsai +1 more | 2018-05-29 |
| 9865478 | Shielding design for metal gap fill | Ming-Chin Tsai, Bo-Hung Lin, You-Hua Chou | 2018-01-09 |
| 9708706 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Ming-Chin Tsai, You-Hua Chou, Chen-Chia Chiang, Chih-Tsung Lee, Ming-Shiou Kuo | 2017-07-18 |
| 9574265 | Rotation plus vibration magnet for magnetron sputtering apparatus | Bo-Hung Lin, Ming-Chih Tsai, You-Hua Chou | 2017-02-21 |
| 9548241 | Semiconductor device metallization systems and methods | Hsiang-Huan Lee, Shau-Lin Shue, Keith Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng +3 more | 2017-01-17 |
| 9318364 | Semiconductor device metallization systems and methods | Hsiang-Huan Lee, Shau-Lin Shue, Keith Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng +3 more | 2016-04-19 |
| 9281221 | Ultra-high vacuum (UHV) wafer processing | Tien-Chen Hu, Mao-Lin Kao, Kuo-Fu Chien, Keith Kuang-Kuo Koai | 2016-03-08 |
| 9279179 | Multi coil target design | Ming-Chin Tsai, Bo-Hung Lin, Chin-Hsiang Lin | 2016-03-08 |
| 9093252 | Rotation plus vibration magnet for magnetron sputtering apparatus | Bo-Hung Lin, Ming-Chih Tsai, You-Hua Chou | 2015-07-28 |
| 9026241 | Closed loop control for reliability | Wen-Cheng Yang, You-Hua Chou, Ming-Chih Tsai, Chen-Chia Chiang, Bo-Hung Lin +1 more | 2015-05-05 |
| 8953298 | Electrostatic chuck robotic system | You-Hua Chou, Chih-Tsung Lee, Ming-Shiou Kuo | 2015-02-10 |
| 8926806 | Shielding design for metal gap fill | Ming-Chin Tsai, Bo-Hung Lin, You-Hua Chou | 2015-01-06 |
| 8884526 | Coherent multiple side electromagnets | Bo-Hung Lin, Ming-Chih Tsai, Chia-Ho Chen | 2014-11-11 |
| 7651025 | Guest-service-type convenience system for implementation at ticketing activity, touring activity and retail transaction | Bo-Chen Wu, Li-Jueng Tseng, Bing-Chen Kuo, John Mai | 2010-01-26 |
| 6743296 | Apparatus and method for self-centering a wafer in a sputter chamber | — | 2004-06-01 |
| 6660125 | Sputter PM procedures with polish tool to effectively remove metal defects from target surface nodules (residue) | Ming-Tsong Wang, Kuang-Hsing Liu, Ta-Bin Chen | 2003-12-09 |