Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865478 | Shielding design for metal gap fill | Ming-Chin Tsai, You-Hua Chou, Chung-En Kao | 2018-01-09 |
| 9574265 | Rotation plus vibration magnet for magnetron sputtering apparatus | Ming-Chih Tsai, You-Hua Chou, Chung-En Kao | 2017-02-21 |
| 9543125 | Directing plasma distribution in plasma-enhanced chemical vapor deposition | Hsiang-Wei Lin, Chia-Ho Chen | 2017-01-10 |
| 9279179 | Multi coil target design | Ming-Chin Tsai, Chung-En Kao, Chin-Hsiang Lin | 2016-03-08 |
| 9093252 | Rotation plus vibration magnet for magnetron sputtering apparatus | Ming-Chih Tsai, You-Hua Chou, Chung-En Kao | 2015-07-28 |
| 9026241 | Closed loop control for reliability | Wen-Cheng Yang, Chung-En Kao, You-Hua Chou, Ming-Chih Tsai, Chen-Chia Chiang +1 more | 2015-05-05 |
| 8926806 | Shielding design for metal gap fill | Ming-Chin Tsai, You-Hua Chou, Chung-En Kao | 2015-01-06 |
| 8884526 | Coherent multiple side electromagnets | Ming-Chih Tsai, Chia-Ho Chen, Chung-En Kao | 2014-11-11 |
| 8228007 | Microwave supplying apparatus and microwave plasma system | Chung-Chun Huang, Tsun-Hsu Chang, Chi-Wen Hu | 2012-07-24 |
| D524837 | Digital camera | Chih-Hui Chen | 2006-07-11 |