Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10190209 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Chung-En Kao, Ming-Chin Tsai, You-Hua Chou, Chih-Tsung Lee, Ming-Shiou Kuo | 2019-01-29 |
| 9708706 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Chung-En Kao, Ming-Chin Tsai, You-Hua Chou, Chih-Tsung Lee, Ming-Shiou Kuo | 2017-07-18 |
| 9026241 | Closed loop control for reliability | Wen-Cheng Yang, Chung-En Kao, You-Hua Chou, Ming-Chih Tsai, Bo-Hung Lin +1 more | 2015-05-05 |
| 6071831 | Method of reducing spiral defects by adding an isopropyl alcohol rinse step before depositing sog | Chung-An Lin | 2000-06-06 |