Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10190209 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Chung-En Kao, Ming-Chin Tsai, You-Hua Chou, Chen-Chia Chiang, Chih-Tsung Lee | 2019-01-29 |
| 10043892 | Method for manufacturing a semiconductor device | Chia-Ying Li, Wei Wu, Zong-Han Li, Ching-Lun Lai | 2018-08-07 |
| 9716044 | Interlayer dielectric structure with high aspect ratio process (HARP) | Jen-Chi Chang, Chun-Li Lin, Kai-Shiung Hsu, Wen-Long Lee, Po-Hsiung Leu +1 more | 2017-07-25 |
| 9708706 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Chung-En Kao, Ming-Chin Tsai, You-Hua Chou, Chen-Chia Chiang, Chih-Tsung Lee | 2017-07-18 |
| 8953298 | Electrostatic chuck robotic system | Chung-En Kao, You-Hua Chou, Chih-Tsung Lee | 2015-02-10 |
| 8916480 | Chemical vapor deposition film profile uniformity control | Chih-Tsung Lee, You-Hua Chou, Ming-Chin Tsai, Chia-Ho Chen, Chin-Hsiang Lin | 2014-12-23 |
| 8624394 | Integrated technology for partial air gap low K deposition | Hung Jui Chang, Chih-Tsung Lee, You-Hua Chou, Shiu-Ko Jang Jian | 2014-01-07 |