Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9921493 | Photolithography system, method for transporting photo-mask and unit therein | Chi-Feng Tung, Hsiang Yin Shen, Chih-Cheng Hsiao | 2018-03-20 |
| 9852932 | Method for processing semiconductor wafer | Hsu-Shui Liu, Jiun-Rong Pai, Li-Jen Ko, Hsiang Yin Shen, Tien-Chen Hu | 2017-12-26 |
| 9558974 | Semiconductor processing station and method for processing semiconductor wafer | Hsu-Shui Liu, Tien-Chen Hu, Li-Jen Ko, Hsiang Yin Shen, Jiun-Rong Pai | 2017-01-31 |
| 9305815 | Automated material handling system and method for semiconductor manufacturing | Chi-Feng Tung, Hsiang Yin Shen, Chin-Hsiang Lin | 2016-04-05 |
| 9281221 | Ultra-high vacuum (UHV) wafer processing | Chung-En Kao, Tien-Chen Hu, Kuo-Fu Chien, Keith Kuang-Kuo Koai | 2016-03-08 |
| 9048274 | Portable stocker and method of using same | Wei Wang, Feng-Ning Lee, Chi-Feng Tung, Li-Jen Ko | 2015-06-02 |