Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12215422 | Shower head structure and plasma processing apparatus using the same | Huan-Chieh Chen, JHIH-REN LIN, TAI-PIN LIU, Shyue-Shin Tsai | 2025-02-04 |
| 12164221 | Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof | Benny KU, Wen-Hao Cheng | 2024-12-10 |
| 11859284 | Shower head structure and plasma processing apparatus using the same | Huan-Chieh Chen, JHIH-REN LIN, TAI-PIN LIU, Shyue-Shin Tsai | 2024-01-02 |
| 11762280 | Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof | Benny KU, Wen-Hao Cheng | 2023-09-19 |
| 11699574 | Aluminum apparatus with aluminum oxide layer and method for forming the same | Ru-Chien Chiu, Bing Chen | 2023-07-11 |
| 11517995 | Wet chemical heating system and a method of chemical mechanical polishing | Ji Cui, CHIA-HSUN CHANG, Chih-Hung Chen, Liang-Guang Chen, Tzu kai Lin +1 more | 2022-12-06 |
| 11454877 | Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof | Benny KU, Wen-Hao Cheng | 2022-09-27 |
| 11443923 | Apparatus for fabricating a semiconductor structure and method of fabricating a semiconductor structure | SHIH-KUO LIU, Wen-Chih Wang, Hsin-Liang Chen | 2022-09-13 |
| 11318506 | Apparatus for cleaning semiconductor equipment | SHIH-KUO LIU, CHIA-HSUN CHANG, Wai Hong Cheah, Ming-Chuan Hung | 2022-05-03 |
| 11214868 | Chemical vapor deposition apparatus and blocker plate | Huan-Chieh Chen, Chao-Chun Wang, Chih-Yu Wu | 2022-01-04 |
| 11067515 | Apparatus and method for inspecting a wafer process chamber | Stanley Shin, Kai-Hsiang Chang, Sheng Cho Lin | 2021-07-20 |
| 10876208 | Apparatus and method for fabricating a semiconductor device | Kai-Hsiang Chang | 2020-12-29 |
| 10868241 | Apparatus for polarizing a semiconductor wafer and method for fabricating a magnetic semiconductor device | Jim Wu, Li-Chun Tseng, CHIA-HSUN CHANG, Wen-Chih Wang | 2020-12-15 |
| 10784087 | Aluminum apparatus with aluminum oxide layer and method for forming the same | Ru-Chien Chiu, Bing Chen | 2020-09-22 |
| 10626499 | Deposition device structure | Yen-Chan Lo, Huan-Chieh Chen, Yi-Fang Lai, Chin-Feng Sun, Po-Hsiung Leu +2 more | 2020-04-21 |
| 10269573 | Device and method for manufacturing a semiconductor structure | Kun-Mo Lin, Chih-Tsung Lee, Victor Lu, Yi-Hung Lin | 2019-04-23 |
| 10262839 | Aluminum apparatus with aluminum oxide layer and method for forming the same | Ru-Chien Chiu, Bing Chen | 2019-04-16 |
| 9548241 | Semiconductor device metallization systems and methods | Hsiang-Huan Lee, Shau-Lin Shue, Hai-Ching Chen, Tung-Ching Tseng, Wen-Cheng Yang +3 more | 2017-01-17 |
| 9318364 | Semiconductor device metallization systems and methods | Hsiang-Huan Lee, Shau-Lin Shue, Hai-Ching Chen, Tung-Ching Tseng, Wen-Cheng Yang +3 more | 2016-04-19 |
| 9281221 | Ultra-high vacuum (UHV) wafer processing | Chung-En Kao, Tien-Chen Hu, Mao-Lin Kao, Kuo-Fu Chien | 2016-03-08 |
| 7871470 | Substrate support lift mechanism | Eric W. Schieve, David T. Or, Rene T. Correa | 2011-01-18 |
| D568914 | Substrate support lift pin | David T. Or, Hiroyuki Takahama, Takahiro Ito, Koji Ota, Hiroshi Sato | 2008-05-13 |
| 6887317 | Reduced friction lift pin | David T. Or, Hiroyuki Takahama, Takahiro Ito, Koji Ota, Hiroshi Sato | 2005-05-03 |
| 6410089 | Chemical vapor deposition of copper using profiled distribution of showerhead apertures | Xin Sheng Guo, Ling Chen, Mohan K. Bhan, Bo Zheng | 2002-06-25 |
| 6364949 | 300 mm CVD chamber design for metal-organic thin film deposition | David T. Or, Fufa Chen, Lawrence Chung-Lai Lei | 2002-04-02 |