Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854769 | Adjustable fastening device for plasma gas injectors | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Chien-Fang Lin | 2023-12-26 |
| 11670490 | Integrated circuit fabrication system with adjustable gas injector | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Chien-Fang Lin | 2023-06-06 |
| 11361943 | Adjustable fastening device for plasma gas injectors | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Chien-Fang Lin | 2022-06-14 |
| 11355318 | Adjustable fastening device for plasma gas injectors | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Chien-Fang Lin | 2022-06-07 |
| 11318506 | Apparatus for cleaning semiconductor equipment | SHIH-KUO LIU, CHIA-HSUN CHANG, Keith Kuang-Kuo Koai, Ming-Chuan Hung | 2022-05-03 |
| 11043388 | Integrated circuit fabrication system with adjustable gas injector and method utilizing the same | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Chien-Fang Lin | 2021-06-22 |
| 10840066 | Adjustable fastening device for plasma gas injectors | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Chien-Fang Lin | 2020-11-17 |