Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854769 | Adjustable fastening device for plasma gas injectors | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Wai Hong Cheah | 2023-12-26 |
| 11670490 | Integrated circuit fabrication system with adjustable gas injector | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Wai Hong Cheah | 2023-06-06 |
| 11361943 | Adjustable fastening device for plasma gas injectors | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Wai Hong Cheah | 2022-06-14 |
| 11355318 | Adjustable fastening device for plasma gas injectors | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Wai Hong Cheah | 2022-06-07 |
| 11043388 | Integrated circuit fabrication system with adjustable gas injector and method utilizing the same | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Wai Hong Cheah | 2021-06-22 |
| 10840066 | Adjustable fastening device for plasma gas injectors | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Wai Hong Cheah | 2020-11-17 |
| 10365672 | Method and system for monitoring temperature of wafer | Shu-Han Chen, Sheng-Hung Lin, Han-Hsuan Hsu | 2019-07-30 |
| 7635417 | Semiconductor apparatus and cleaning unit thereof | Jen-Chih Lu | 2009-12-22 |
| 7313262 | Apparatus for visualization of process chamber conditions | Chung-Yuan Lin | 2007-12-25 |